Patents by Inventor Andy MO

Andy MO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RADIO FREQUENCY ROD GEOMETRY FOR CONTROLLING IMPEDENCE IN ELECTROSTATIC CHUCK
    Publication number: 20260354101
    Abstract: A radio frequency (RF) rod adapted for installation in an electrostatic chuck, the RF rod including a main body defined by central portion, a first terminal portion extending axially from a first end of the central portion, and a second terminal portion extending axially from a second end of the central portion, wherein a diameter of the central portion is greater than diameters of the first terminal portion and the second terminal portion.
    Type: Application
    Filed: April 30, 2025
    Publication date: November 5, 2026
    Applicant: Applied Materials, Inc.
    Inventors: Jae Chull Lee, Hungsen Kang, Andy Mo
  • METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
    Publication number: 20250364216
    Abstract: Methods and apparatus for processing a substrate are herein described. For example, a processing system for processing a substrate comprises a chamber body defining a processing volume, a radio frequency (RF) power source configured to generate RF energy, an impedance matching network configured to optimize delivery of the RF energy to a plasma in the processing volume, and an RF filter connected between the radio frequency (RF) power source and the matching network via an RF cable.
    Type: Application
    Filed: July 10, 2024
    Publication date: November 27, 2025
    Inventors: Rongping WANG, Andy MO, Junwei SHANGGUAN