Patents by Inventor Anette Jakob

Anette Jakob has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultrasonic cleaning method and apparatus
    Patent number: 8486199
    Abstract: A device and method for treating the surface of a semiconductor wafer provides a treatment fluid in the form of a dispersion of gas bubbles in a treatment liquid generated at acoustic pressures less than those required to induce cavitation in the treatment liquid. A resonator supplies ultrasonic or megasonic energy to the treatment fluid and is configured to create an interference pattern in the treatment fluid comprising regions of pressure amplitude minima and maxima at an interface of the treatment fluid and the semiconductor wafer.
    Type: Grant
    Filed: July 22, 2011
    Date of Patent: July 16, 2013
    Assignees: Lam Research AG, Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Frank Holsteyns, Alexander Lippert, Christian Degel, Anette Jakob, Franz Josef Becker
  • ULTRASONIC CLEANING METHOD AND APPARATUS
    Publication number: 20130019893
    Abstract: A device and method for treating the surface of a semiconductor wafer provides a treatment fluid in the form of a dispersion of gas bubbles in a treatment liquid generated at acoustic pressures less than those required to induce cavitation in the treatment liquid. A resonator supplies ultrasonic or megasonic energy to the treatment fluid and is configured to create an interference pattern in the treatment fluid comprising regions of pressure amplitude minima and maxima at an interface of the treatment fluid and the semiconductor wafer.
    Type: Application
    Filed: July 22, 2011
    Publication date: January 24, 2013
    Applicants: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V., LAM Research AG
    Inventors: Frank HOLSTEYNS, Alexander LIPPERT, Christian DEGEL, Anette JAKOB, Franz Josef BECKER
  • Ultrasound Actuator for Cleaning Objects
    Publication number: 20090165830
    Abstract: The present invention relates to an ultrasound actuator for cleaning objects, having a propagation volume (3,4,13) for ultrasound, on which one or more ultrasonic transducers (5) are arranged. The propagation volume (3,4,13) is delimited by an acoustic coupling-out window (8) with a coupling face for acoustically coupling an object (1,12) to be cleaned and by one or more reflection faces (6,7) for coupled-in ultrasound. The ultrasonic transducers (5) are arranged on the propagation volume (3,4,13) such that the coupled-in ultrasound exits the propagation volume (3,4,13) via the coupling-out window (8) only after one or more reflections at the reflection faces (6,7). The reflection faces are designed such that a predeterminable distribution of the ultrasound energy without intensity peaks results at the coupling-out window (8). The present ultrasound actuator is used to achieve gentle cleaning of the objects with economic use of cleaning liquid.
    Type: Application
    Filed: February 9, 2007
    Publication date: July 2, 2009
    Applicant: Fraunhofer-Gesellschaft zur Förderung der angweandten Forschung e.V.
    Inventors: Christian Degel, Anette Jakob, Franz Josef Becker