Patents by Inventor Ang-Goo Lee

Ang-Goo Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100313764
    Abstract: An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a heating section connected to a process chamber of the semiconductor processing or flat panel display processing device. The heating section is designed to preheat the reaction by-products to prevent or reduce liquefaction of the reaction by-products. A by-product pile up section then rapidly cools the heated reaction by-products to convert the same into a solid form.
    Type: Application
    Filed: August 23, 2010
    Publication date: December 16, 2010
    Inventors: Ang-Goo Lee, Kwang-Jin Park
  • Patent number: 7837770
    Abstract: An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a heating section connected to a process chamber of the semiconductor processing or flat panel display processing device. The heating section is designed to preheat the reaction by-products to prevent or reduce liquefaction of the reaction by-products. A by-product pile up section then rapidly cools the heated reaction by-products to convert the same into a solid form.
    Type: Grant
    Filed: April 27, 2006
    Date of Patent: November 23, 2010
    Inventors: Ang-Goo Lee, Kwang-Jin Park
  • Publication number: 20060243137
    Abstract: An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a heating section connected to a process chamber of the semiconductor processing or flat panel display processing device. The heating section is designed to preheat the reaction by-products to prevent or reduce liquefaction of the reaction by-products. A by-product pile up section then rapidly cools the heated reaction by-products to convert the same into a solid form.
    Type: Application
    Filed: April 27, 2006
    Publication date: November 2, 2006
    Inventors: Ang-Goo Lee, Kwang-Jin Park