Patents by Inventor Angela C. Lamberti

Angela C. Lamberti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monolithic silicon membrane device fabrication process
    Patent number: 4978421
    Abstract: The method of fabrication of a monolithic silicon membrane structure in which the membrane and its supporting framework are constructed from a single ultra thick body of silicon. The fabrication sequence includes the steps of providing a doped membrane layer on the silicon body, forming an apertured mask on the silicon body, and removal of an unwanted silicon region by mechanical grinding and chemical etching to provide a well opening in the silicon body terminating in the doped membrane.
    Type: Grant
    Filed: November 13, 1989
    Date of Patent: December 18, 1990
    Assignee: International Business Machines Corporation
    Inventors: Ernest Bassous, Joseph M. Blum, Kevin K. Chan, Angela C. Lamberti, Constantino Lapadula, Istvan Lovas, Alan D. Wilson