Patents by Inventor Angela Carolina Narváez-González

Angela Carolina Narváez-González has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated optical and charged particle inspection apparatus
    Patent number: 9378921
    Abstract: The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: June 28, 2016
    Assignee: DELMIC B.V.
    Inventors: Jacob Pieter Hoogenboom, Aernout Christiaan Zonnevylle, Pieter Kruit, Angela Carolina Narváez-González
  • INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS
    Publication number: 20150262784
    Abstract: The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
    Type: Application
    Filed: September 16, 2013
    Publication date: September 17, 2015
    Inventors: Jacob Pieter Hoogenboom, Aernout Christiaan Zonnevylle, Pieter Kruit, Angela Carolina Narváez-González