Patents by Inventor Angela G. Franklin

Angela G. Franklin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for detecting metal content on a semiconductor surface and method of operating the same
    Patent number: 7057386
    Abstract: An apparatus for detecting the presence of metal material in a semiconductor wafer. The apparatus comprises: (i) a current-carrying coil for generating a first magnetic field, wherein the first magnetic field is capable of causing the metal material in the semiconductor wafer to generate an opposing magnetic field; and (ii) a detection circuit for detecting the opposing magnetic field generated by the metal material when the semiconductor wafer is in proximity to the current-carrying coil.
    Type: Grant
    Filed: December 31, 2004
    Date of Patent: June 6, 2006
    Assignee: National Semiconductor Corporation
    Inventor: Angela G. Franklin
  • System for detecting metal content on a semiconductor surface and method of operating the same
    Patent number: 6838874
    Abstract: An apparatus for detecting the presence of metal material in a semiconductor wafer. The apparatus comprises: (i) a current-carrying coil for generating a first magnetic field, wherein the first magnetic field is capable of causing the metal material in the semiconductor wafer to generate an opposing magnetic field; and (ii) a detection circuit for detecting the opposing magnetic field generated by the metal material when the semiconductor wafer is in proximity to the current-carrying coil.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: January 4, 2005
    Assignee: National Semiconductor Corporation
    Inventor: Angela G. Franklin