Patents by Inventor Angela Mroczek Mroczek-Petroski

Angela Mroczek Mroczek-Petroski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20020127862
    Abstract: A polishing pad for use in chemical mechanical polishing of substrates that being made of fibrous matrix such as cellulose with a binder consisting of thermoset resin material, such as phenolic resin. The polishing surface is ground to form asperities. The polishing pad provides a porous structure by which polishing slurry and polishing debris during chemical mechanical polishing of substrates are stored for subsequent rinsing away, and for enhanced flow-distribution of the polishing slurry. Also disclosed is a method of making the polishing pad.
    Type: Application
    Filed: March 1, 2002
    Publication date: September 12, 2002
    Inventors: Richard D. Cooper, Paul Fathauer, Angela Mroczek Mroczek-Petroski, David Perry