Patents by Inventor Angela Rose Sico

Angela Rose Sico has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for sealing a slit valve door
    Patent number: 8991785
    Abstract: Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.
    Type: Grant
    Filed: October 22, 2008
    Date of Patent: March 31, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Angela Rose Sico, Michael R. Rice, James D. Strassner
  • METHODS AND APPARATUS FOR SEALING A SLIT VALVE DOOR
    Publication number: 20090108544
    Abstract: Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion of the length of the seal, wherein the hard stop and the seal fill at least a portion of a gap between the slit valve door and a substrate sealing surface. Numerous other aspects are provided.
    Type: Application
    Filed: October 22, 2008
    Publication date: April 30, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Angela Rose Sico, Michael R. Rice, James D. Strassner