Patents by Inventor Angelo Antonio Merassi
Angelo Antonio Merassi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9815687Abstract: A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.Type: GrantFiled: March 30, 2016Date of Patent: November 14, 2017Assignee: STMICROELECTRONICS S.R.L.Inventor: Angelo Antonio Merassi
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Patent number: 9486593Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.Type: GrantFiled: March 25, 2014Date of Patent: November 8, 2016Assignee: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani
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Publication number: 20160207757Abstract: A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.Type: ApplicationFiled: March 30, 2016Publication date: July 21, 2016Inventor: Angelo Antonio Merassi
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Patent number: 9340413Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.Type: GrantFiled: September 24, 2013Date of Patent: May 17, 2016Assignee: STMICROELECTRONICS S.R.L.Inventors: Angelo Antonio Merassi, Sarah Zerbini, Luca Coronato
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Patent number: 9327962Abstract: A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.Type: GrantFiled: February 25, 2014Date of Patent: May 3, 2016Assignee: STMICROELECTRONICS S.R.L.Inventor: Angelo Antonio Merassi
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Patent number: 9184138Abstract: A semiconductor integrated device is provided with: a die having a body of semiconductor material with a front surface, and an active area arranged at the front surface; and a package having a support element carrying the die at a back surface of the body, and a coating material covering the die. The body includes a mechanical decoupling region, which mechanically decouples the active area from mechanical stresses induced by the package; the mechanical decoupling region is a trench arrangement within the body, which releases the active area from an external frame of the body, designed to absorb the mechanical stresses induced by the package.Type: GrantFiled: December 18, 2012Date of Patent: November 10, 2015Assignees: STMicroelectronics (Grenoble 2) SAS, STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Marco Ferrera, Marco Mantovani, Paolo Ferrari, Benedetto Vigna
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Patent number: 9080871Abstract: A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.Type: GrantFiled: September 12, 2012Date of Patent: July 14, 2015Assignee: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Biagio De Masi, Alberto Corigliano
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Publication number: 20140252509Abstract: A micromechanical structure of a MEMS device, integrated in a die of semiconductor material provided with a substrate and having at least a first axis of symmetry lying in a horizontal plane, has a stator structure, which is fixed with respect to the substrate, and a rotor structure, having a suspended mass, mobile with respect to the substrate and to the stator structure as a result of an external action, the stator structure having fixed sensing electrodes capacitively coupled to the rotor structure; a compensation structure is integrated in the die for compensation of thermo-mechanical strains. The compensation structure has stator compensation electrodes, which are fixed with respect to the substrate, are capacitively coupled to the rotor structure, and are arranged symmetrically to the fixed sensing electrodes with respect to the first axis of symmetry.Type: ApplicationFiled: February 25, 2014Publication date: September 11, 2014Applicant: STMicroelectronics S.r.l.Inventor: Angelo Antonio Merassi
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Publication number: 20140202453Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.Type: ApplicationFiled: March 25, 2014Publication date: July 24, 2014Applicant: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani
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Patent number: 8721910Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.Type: GrantFiled: January 30, 2013Date of Patent: May 13, 2014Assignee: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani
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Patent number: 8661900Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.Type: GrantFiled: January 15, 2008Date of Patent: March 4, 2014Assignee: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Sarah Zerbini, Barbara Simoni
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Publication number: 20140038335Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.Type: ApplicationFiled: September 24, 2013Publication date: February 6, 2014Applicant: STMicroelectronics S.r.l.Inventors: Angelo Antonio Merassi, Sarah Zerbini, Luca Coronato
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Patent number: 8565452Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.Type: GrantFiled: December 22, 2009Date of Patent: October 22, 2013Assignee: STMicroelectronics S.r.l.Inventors: Luca Coronato, Sarah Zerbini, Angelo Antonio Merassi
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Publication number: 20130081466Abstract: A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.Type: ApplicationFiled: September 12, 2012Publication date: April 4, 2013Applicants: POLITECNICO DI MILANO, STMICROELECTRONICS S.R.L.Inventors: Angelo Antonio Merassi, Biagio De Masi, Alberto Corigliano
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Publication number: 20100158280Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.Type: ApplicationFiled: December 22, 2009Publication date: June 24, 2010Applicant: STMICROELECTRONICS S.R.L.Inventors: Luca Coronato, Sarah Zerbini, Angelo Antonio Merassi
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Publication number: 20100154790Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.Type: ApplicationFiled: December 22, 2009Publication date: June 24, 2010Applicant: STMICROELECTRONICS S.R.L.Inventors: Angelo Antonio Merassi, Angelo Pesci, Benedetto Vigna, Ernestino Galeazzi, Marco Mantovani
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Publication number: 20080173959Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.Type: ApplicationFiled: January 15, 2008Publication date: July 24, 2008Applicant: STMICROELECTRONICS S.R.L.Inventors: Angelo Antonio Merassi, Sarah Zerbini, Barbara Simoni