Patents by Inventor Anh N. Nguyen

Anh N. Nguyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190307114
    Abstract: An insect trap useful for trapping flying insects, the insect trap comprising an upper housing including at least one horizontal row of light emitting diodes extending across an outer surface of a curved front wall such that light from each of the light emitting diodes is projected outwardly from the upper housing at a different angle than adjacent light emitting diodes in the horizontal row of light emitting diodes, a base housing including an opening through which insects can enter an interior of the base housing, and an insect trapping element facing the opening in the base housing.
    Type: Application
    Filed: April 4, 2018
    Publication date: October 10, 2019
    Applicant: Philip Morris USA Inc.
    Inventors: Lizbel I. Cajigas, Hoc V. Nguyen, Peter Edde, Anh N. Dinh, David Gabriel Bustos
  • Patent number: 10431435
    Abstract: A wafer carrier is described with independent isolated heater zones. In one example, the carrier has a puck to carry a workpiece for fabrication processes, a heater plate having a plurality of thermally isolated blocks each thermally coupled to the puck, and each having a heater to heat a respective block of the heater plate, and a cooling plate fastened to and thermally coupled to the heater plate, the cooling plate having a cooling channel to carry a heat transfer fluid to transfer heat from the cooling plate.
    Type: Grant
    Filed: February 4, 2015
    Date of Patent: October 1, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen, David Palagashvill
  • Publication number: 20180005856
    Abstract: Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
    Type: Application
    Filed: September 18, 2017
    Publication date: January 4, 2018
    Inventors: Anzhong CHANG, Paul BRILLHART, Surajit KUMAR, Satheesh KUPPURAO, Mehmet Tugrul SAMIR, David K. CARLSON, Steve ABOAGYE, Anh N. NGUYEN, Kailash Kiran PATALAY, Joseph M. RANISH, Oleg V. SEREBRYANOV, Dongming IU, Shu-Kwan LAU, Zuoming ZHU, Herman DINIZ
  • Publication number: 20170335457
    Abstract: Embodiments disclosed herein generally relate to a gas distribution assembly for providing improved uniform distribution of processing gases into a semiconductor processing chamber. The gas distribution assembly includes a gas distribution plate, a blocker plate, and a dual zone showerhead. The gas distribution assembly provides for independent center to edge flow zonality, independent two precursor delivery, two precursor mixing via a mixing manifold, and recursive mass flow distribution in the gas distribution plate.
    Type: Application
    Filed: April 20, 2017
    Publication date: November 23, 2017
    Inventors: Anh N. NGUYEN, Dmitry LUBOMIRSKY, Mehmet Tugrul SAMIR
  • Publication number: 20170335456
    Abstract: Embodiments disclosed herein generally relate to a gas distribution assembly for providing improved uniform distribution of processing gases into a semiconductor processing chamber. The gas distribution assembly includes a gas distribution plate, a blocker plate, and a dual zone showerhead. The gas distribution assembly provides for independent center to edge flow zonality, independent two precursor delivery, two precursor mixing via a mixing manifold, and recursive mass flow distribution in the gas distribution plate.
    Type: Application
    Filed: April 20, 2017
    Publication date: November 23, 2017
    Inventors: Anh N. NGUYEN, Dmitry LUBOMIRSKY, Mehmet Tugrul SAMIR
  • Patent number: 9768043
    Abstract: Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: September 19, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson, Steve Aboagye, Anh N. Nguyen, Kailash Kiran Patalay, Joseph M. Ranish, Oleg Serebryanov, Dongming Iu, Shu-Kwan Lau, Zuoming Zhu, Herman Diniz
  • Patent number: 9766022
    Abstract: A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: September 19, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Tao Hou, Son T. Nguyen, Kenric T. Choi, Anh N. Nguyen
  • Publication number: 20170250060
    Abstract: A workpiece carrier is described for a plasma processing chamber that has isolated heater plate blocks. In one example, a plasma processing system has a plasma chamber, a plasma source electrically coupled with a showerhead included within the plasma chamber, a workpiece holder in a processing region of the plasma chamber having a puck to carry a workpiece, wherein the workpiece holder includes a heater plate having a plurality of thermally isolated blocks each thermally coupled to the puck, wherein each block includes a heater to heat a respective block of the heater plate, and wherein the workpiece holder includes a cooling plate fastened to and thermally coupled to the heater plate, the cooling plate defining a cooling channel configured to distribute a heat transfer fluid to transfer heat from the cooling plate, and a temperature controller to independently control each heater.
    Type: Application
    Filed: May 12, 2017
    Publication date: August 31, 2017
    Inventors: Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen, David Palagashvili
  • Patent number: 9312154
    Abstract: Embodiments of the invention provide improved apparatus for depositing layers on substrates, such as by chemical vapor deposition (CVD). The inventive apparatus disclosed herein may advantageously facilitate one or more of depositing films having reduced film thickness non-uniformity within a given process chamber, improved particle performance (e.g., reduced particles on films formed in the process chamber), chamber-to-chamber performance matching amongst a plurality of process chambers, and improved process chamber serviceability.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: April 12, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Binh Tran, Anqing Cui, Bernard L. Hwang, Son T. Nguyen, Anh N. Nguyen, Sean M. Seutter, Xianzhi Tao
  • Publication number: 20160035544
    Abstract: A wafer carrier is described with independent isolated heater zones. In one example, the carrier has a puck to carry a workpiece for fabrication processes, a heater plate having a plurality of thermally isolated blocks each thermally coupled to the puck, and each having a heater to heat a respective block of the heater plate, and a cooling plate fastened to and thermally coupled to the heater plate, the cooling plate having a cooling channel to carry a heat transfer fluid to transfer heat from the cooling plate.
    Type: Application
    Filed: February 4, 2015
    Publication date: February 4, 2016
    Inventors: Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen, David Palagashvill
  • Patent number: 9175394
    Abstract: Embodiments of the invention relate to apparatus and methods for depositing materials on substrates during atomic layer deposition processes. In one embodiment, a chamber lid assembly comprises a channel having an upper portion and a lower portion, wherein the channel extends along a central axis, a housing having an inner region and at least partially defining two or more annular channels, an insert disposed in the inner region and defining the upper portion, the upper portion fluidly coupled with the two or more annular channels, and a tapered bottom surface extending from the bottom portion of the channel to a peripheral portion of the chamber lid assembly.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: November 3, 2015
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joseph Yudovsky, Anh N. Nguyen, Tai T. Ngo
  • Publication number: 20140199056
    Abstract: Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
    Type: Application
    Filed: December 18, 2013
    Publication date: July 17, 2014
    Inventors: Anzhong CHANG, Paul BRILLHART, Surajit KUMAR, Satheesh KUPPURAO, Mehmet Tugrul SAMIR, David K. CARLSON, Steve ABOAGYE, Anh N. NGUYEN, Kailash Kiran PATALAY, Joseph M. RANISH, Oleg SEREBRYANOV, Dongming IU, Shu-Kwan LAU, Zuoming ZHU, Herman DINIZ
  • Publication number: 20130058637
    Abstract: A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.
    Type: Application
    Filed: November 2, 2012
    Publication date: March 7, 2013
    Inventors: Tao Hou, Son T. Nguyen, Kenric T. Choi, Anh N. Nguyen
  • Patent number: 8382897
    Abstract: Methods for gas delivery to a process chamber are provided herein. In some embodiments, a method may include flowing a process gas through one or more gas conduits, each gas conduit having an inlet and an outlet for facilitating the flow of gas through the gas conduits and into a gas inlet funnel having a second volume, wherein each gas conduit has a first volume less than the second volume, and wherein each gas conduit has a cross-section that increases from a first cross-section proximate the inlet to a second cross-section proximate the outlet but excluding any intersection points between the gas inlet funnel and the gas conduit, and wherein the second cross-section is non-circular; and delivering the process gas to the substrate via the gas inlet funnel.
    Type: Grant
    Filed: April 25, 2012
    Date of Patent: February 26, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Kedarnath Sangam, Anh N. Nguyen
  • Patent number: 8309874
    Abstract: A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.
    Type: Grant
    Filed: May 16, 2008
    Date of Patent: November 13, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Tao Hou, Son T. Nguyen, Kenric Choi, Anh N. Nguyen
  • Publication number: 20120225191
    Abstract: Provided are atomic layer deposition apparatus and methods including a gas distribution plate comprising at least one gas injector unit. Each gas injector unit comprises a plurality of elongate gas injectors including at least two first reactive gas injectors and at least one second reactive gas injector, the at least two first reactive gas injectors surrounding the at least one second reactive gas injector. Also provided are atomic layer deposition apparatuses and methods including a gas distribution plate with a plurality of gas injector units.
    Type: Application
    Filed: March 1, 2011
    Publication date: September 6, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Garry K. Kwong, Mei Chang, Anh N. Nguyen, David Thompson
  • Publication number: 20120225192
    Abstract: Provided are atomic layer deposition apparatus and methods including a gas distribution plate comprising at least one gas injector unit. Each gas injector unit comprises a plurality of elongate gas injectors including at least two first reactive gas injectors and at least one second reactive gas injector, the at least two first reactive gas injectors surrounding the at least one second reactive gas injector. Also provided are atomic layer deposition apparatuses and methods including a gas distribution plate with a plurality of gas injector units.
    Type: Application
    Filed: July 25, 2011
    Publication date: September 6, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Garry K. Kwong, Mei Chang, Anh N. Nguyen, David Thompson
  • Publication number: 20120208372
    Abstract: Methods for gas delivery to a process chamber are provided herein. In some embodiments, a method may include flowing a process gas through one or more gas conduits, each gas conduit having an inlet and an outlet for facilitating the flow of gas through the gas conduits and into a gas inlet funnel having a second volume, wherein each gas conduit has a first volume less than the second volume, and wherein each gas conduit has a cross-section that increases from a first cross-section proximate the inlet to a second cross-section proximate the outlet but excluding any intersection points between the gas inlet funnel and the gas conduit, and wherein the second cross-section is non-circular; and delivering the process gas to the substrate via the gas inlet funnel.
    Type: Application
    Filed: April 25, 2012
    Publication date: August 16, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: KEDARNATH SANGAM, ANH N. NGUYEN
  • Publication number: 20120135609
    Abstract: Provided are gas distribution plates (showerheads) for use in an apparatus configured to form a film during, for example, an atomic layer deposition (ALD) process. The gas distribution plate comprises a body defining a thickness and a peripheral edge and has a front surface for facing the substrate. The front surface has a central region with a plurality of openings configured to distribute process gases over the substrate and a focus ring with a sloped region. The focus ring is concentric to the central region such that the thickness at the focus ring is greater than the thickness at the central region.
    Type: Application
    Filed: November 30, 2010
    Publication date: May 31, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Tatsuya Sato, Kenric Choi, Anh N. Nguyen, Faruk Gungor
  • Patent number: 8187381
    Abstract: Methods and apparatus for a gas delivery assembly are provided herein. In some embodiments, the gas delivery assembly includes a gas inlet funnel having a first volume and one or more gas conduits; each gas conduit having an inlet and an outlet for facilitating the flow of a gas therethrough and into the first volume, wherein each gas conduit has a second volume less than the first volume, and wherein each gas conduit has a cross-section that increases from a first cross-section proximate the inlet to a second cross-section proximate the outlet, wherein the second cross-section is non-circular. In some embodiments, each conduit has a longitudinal axis that intersects a central axis of the gas inlet funnel.
    Type: Grant
    Filed: August 22, 2008
    Date of Patent: May 29, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Kedarnath Sangam, Anh N. Nguyen