Patents by Inventor Anh Ngoc Duong

Anh Ngoc Duong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160043046
    Abstract: Methods for wet etching a UBM layer and the resulting devices are disclosed. Embodiments may include patterning metal bumps on a wafer that has at least two metal layers thereon; exposing the wafer to a first acid solution to remove a portion of a first of the two metal layers exposed by the patterning of the metal bumps; and exposing the wafer to a second acid solution to remove a portion a second of the two metal layers exposed by the patterning of the metal bumps and the exposure of the wafer to the first acid solution, wherein an undercut below the metal bumps, formed by removal of the portions of the first and second metal layers, is less than 1.5 microns.
    Type: Application
    Filed: October 16, 2015
    Publication date: February 11, 2016
    Inventors: Tanya Andreeva ATANASOVA, Reiner WILLEKE, Anh Ngoc DUONG
  • Patent number: 9214436
    Abstract: Methods for wet etching a UBM layer and the resulting devices are disclosed. Embodiments may include patterning metal bumps on a wafer that has at least two metal layers thereon; exposing the wafer to a first acid solution to remove a portion of a first of the two metal layers exposed by the patterning of the metal bumps; and exposing the wafer to a second acid solution to remove a portion a second of the two metal layers exposed by the patterning of the metal bumps and the exposure of the wafer to the first acid solution, wherein an undercut below the metal bumps, formed by removal of the portions of the first and second metal layers, is less than 1.5 microns.
    Type: Grant
    Filed: February 4, 2014
    Date of Patent: December 15, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Tanya Andreeva Atanasova, Reiner Willeke, Anh Ngoc Duong
  • Publication number: 20150221605
    Abstract: Methods for wet etching a UBM layer and the resulting devices are disclosed. Embodiments may include patterning metal bumps on a wafer that has at least two metal layers thereon; exposing the wafer to a first acid solution to remove a portion of a first of the two metal layers exposed by the patterning of the metal bumps; and exposing the wafer to a second acid solution to remove a portion a second of the two metal layers exposed by the patterning of the metal bumps and the exposure of the wafer to the first acid solution, wherein an undercut below the metal bumps, formed by removal of the portions of the first and second metal layers, is less than 1.5 microns.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 6, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Tanya Andreeva ATANASOVA, Reiner WILLEKE, Anh Ngoc DUONG
  • Patent number: 8833454
    Abstract: A process for increasing the efficiency of hydrocarbon recovery from an underground formation containing viscous hydrocarbons through the use of both gravity drainage and mobile water drive. The process comprises a pair of vertically-spaced horizontal wells and a laterally offset horizontal well. A heated fluid is injected into the formation via a first well pair, and an adjacent horizontal well creates a pressure sink to draw the heated fluid laterally to assist growth of the formation drainage area for hydrocarbon recovery improvement. Injected fluids recovered from both producers are collected for recycling.
    Type: Grant
    Filed: July 19, 2010
    Date of Patent: September 16, 2014
    Assignee: ConocoPhillips Company
    Inventor: Anh Ngoc Duong
  • Patent number: 8252685
    Abstract: Techniques to improve characteristics of processed semiconductor substrates are described, including cleaning a substrate using a preclean process, the substrate comprising a dielectric region and a conductive region, introducing a hydroquinone to the substrate after cleaning the substrate using the preclean operation, and forming a capping layer over the conductive region of the substrate after introducing the hydroquinone.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: August 28, 2012
    Assignee: Intermolecular, Inc.
    Inventors: Anh Ngoc Duong, Chi-I Lang
  • Publication number: 20120052694
    Abstract: Techniques to improve characteristics of processed semiconductor substrates are described, including cleaning a substrate using a preclean process, the substrate comprising a dielectric region and a conductive region, introducing a hydroquinone to the substrate after cleaning the substrate using the preclean operation, and forming a capping layer over the conductive region of the substrate after introducing the hydroquinone.
    Type: Application
    Filed: November 4, 2011
    Publication date: March 1, 2012
    Applicant: Intermolecular, Inc.
    Inventors: Anh Ngoc Duong, Chi-I Lang
  • Patent number: 8076240
    Abstract: Techniques to improve characteristics of processed semiconductor substrates are described, including cleaning a substrate using a preclean process, the substrate comprising a dielectric region and a conductive region, introducing a hydroquinone to the substrate after cleaning the substrate using the preclean operation, and forming a capping layer over the conductive region of the substrate after introducing the hydroquinone.
    Type: Grant
    Filed: November 10, 2008
    Date of Patent: December 13, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Anh Ngoc Duong, Chi-l Lang
  • Publication number: 20110017455
    Abstract: A process for increasing the efficiency of hydrocarbon recovery from an underground formation containing viscous hydrocarbons through the use of both gravity drainage and mobile water drive. The process comprises a pair of vertically-spaced horizontal wells and a laterally offset horizontal well. A heated fluid is injected into the formation via a first well pair, and an adjacent horizontal well creates a pressure sink to draw the heated fluid laterally to assist growth of the formation drainage area for hydrocarbon recovery improvement. Injected fluids recovered from both producers are collected for recycling.
    Type: Application
    Filed: July 19, 2010
    Publication date: January 27, 2011
    Applicant: CONOCOPHILLIPS COMPANY
    Inventor: Anh Ngoc Duong
  • Publication number: 20090124081
    Abstract: Techniques to improve characteristics of processed semiconductor substrates are described, including cleaning a substrate using a preclean process, the substrate comprising a dielectric region and a conductive region, introducing a hydroquinone to the substrate after cleaning the substrate using the preclean operation, and forming a capping layer over the conductive region of the substrate after introducing the hydroquinone.
    Type: Application
    Filed: November 10, 2008
    Publication date: May 14, 2009
    Inventors: Anh Ngoc Duong, Chi-I Lang