Patents by Inventor Anhi Pyun

Anhi Pyun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer apparatus
    Patent number: 11721568
    Abstract: The present disclosure relates to a substrate transfer apparatus. The substrate transfer apparatus includes a first transfer apparatus, a second transfer apparatus, a substrate carrier driver, a sensor, a swing apparatus, and a controller. The first transfer apparatus is configured to transfer a substrate in a first direction. The second transfer apparatus is configured to receive the substrate from the first transfer apparatus and transfer the substrate and comprising a substrate carrier on which the substrate transferred from the first transfer apparatus is seated. The substrate carrier driver is configured to move the substrate carrier. The sensor is configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate. The swing apparatus is configured to swing the substrate carrier.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: August 8, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sangho Jang, Dongsoo Lee, Anhi Pyun, Jinyi Lee, Sukbyung Chae
  • SUBSTRATE TRANSFER APPARATUS
    Publication number: 20210193491
    Abstract: The present disclosure relates to a substrate transfer apparatus. The substrate transfer apparatus includes a first transfer apparatus, a second transfer apparatus, a substrate carrier driver, a sensor, a swing apparatus, and a controller. The first transfer apparatus is configured to transfer a substrate in a first direction. The second transfer apparatus is configured to receive the substrate from the first transfer apparatus and transfer the substrate and comprising a substrate carrier on which the substrate transferred from the first transfer apparatus is seated. The substrate carrier driver is configured to move the substrate carrier. The sensor is configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate. The swing apparatus is configured to swing the substrate carrier.
    Type: Application
    Filed: August 18, 2020
    Publication date: June 24, 2021
    Inventors: SANGHO JANG, Dongsoo Lee, Anhi Pyun, Jinyi Lee, Sukbyung Chae