Patents by Inventor Anil Kumar Chinthakindi

Anil Kumar Chinthakindi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7915134
    Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by side wall spacers.
    Type: Grant
    Filed: January 8, 2008
    Date of Patent: March 29, 2011
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7763954
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having at least one metal wiring level within the substrate; an insulative layer on a surface of the substrate; an inductor within the insulative layer; and a wire bond pad within the insulative layer. The inductor and the wire bond pad are substantially co-planar. The inductor has a height greater than a height of the wire bond pad.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: July 27, 2010
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7741698
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above a top surface of the substrate; an insulative layer on and above a top surface of the capping layer; an inductor comprising a first portion in and above the insulative layer and a second portion only above the insulative layer; and a wire bond pad within the insulative layer, wherein the first portion the inductor has a height in a first direction greater than a height of the wire bond pad in the first direction, wherein the first direction is perpendicularly directed from the top surface of substrate toward the insulative layer.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: June 22, 2010
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7732295
    Abstract: A method of forming a semiconductor substrate. A substrate is provided. At least one metal wiring level is within the substrate. A first insulative layer is deposited on a surface of the substrate. A portion of a wire bond pad is formed within the first insulative layer. A second insulative layer is deposited on the first insulative layer. An inductor is within the second insulative layer using a patterned plate process. A remaining portion of the wire bond pad is formed within the second insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: June 8, 2010
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7732294
    Abstract: A method of a semiconductor device. A substrate is provided. At least one metal wiring level is within the substrate. An insulative layer is deposited on a surface of the substrate. An inductor is formed within the insulative layer using a patterned plate process. A wire bond pad is formed within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: June 8, 2010
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7713792
    Abstract: A fuse structure, a method for fabricating the fuse structure and a method for programming a fuse within the fuse structure each use a fuse material layer that is used as a fuse, and located upon a monocrystalline semiconductor material layer in turn located over a substrate. At least part of the monocrystalline semiconductor material layer is separated from the substrate by a gap. Use of the monocrystalline semiconductor material layer, as well as the gap, provides for enhanced uniformity and reproducibility when programming the fuse.
    Type: Grant
    Filed: October 10, 2007
    Date of Patent: May 11, 2010
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Deok-Kee Kim, Chandrasekharan Kothandaraman, Byeongju Park
  • Patent number: 7573117
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above the substrate; an insulative layer on and above the capping layer; a first layer of photo-imagable material on and above the insulative layer; a layer of oxide on and above the first layer of photo-imagable material; a second layer of photo-imagable material on and above the layer of oxide; an inductor; and a wire bond pad. A first portion of the inductor is in the second layer of photo-imagable material, the layer of oxide, the first layer of photo-imagable material, the insulative layer, and the capping layer. A second portion of the inductor is in only the second layer of photo-imagable material. The wire bond pad in only the first layer of photo-imagable material, the insulative layer, and the capping layer.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: August 11, 2009
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20090096059
    Abstract: A fuse structure, a method for fabricating the fuse structure and a method for programming a fuse within the fuse structure each use a fuse material layer that is used as a fuse, and located upon a monocrystalline semiconductor material layer in turn located over a substrate. At least part of the monocrystalline semiconductor material layer is separated from the substrate by a gap. Use of the monocrystalline semiconductor material layer, as well as the gap, provides for enhanced uniformity and reproducibility when programming the fuse.
    Type: Application
    Filed: October 10, 2007
    Publication date: April 16, 2009
    Applicant: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Deok-kee Kim, Chandrasekharan Kothandaraman, Byeongju Park
  • Publication number: 20090004809
    Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by side wall spacers.
    Type: Application
    Filed: January 8, 2008
    Publication date: January 1, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20080293210
    Abstract: A method of forming a semiconductor substrate. A substrate is provided. At least one metal wiring level is within the substrate. A first insulative layer is deposited on a surface of the substrate. A portion of a wire bond pad is formed within the first insulative layer. A second insulative layer is deposited on the first insulative layer. An iductor is within the second insulative layer using a patterned plate process. A remaining portion of the wire bond pad is formed within the second insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
    Type: Application
    Filed: July 10, 2008
    Publication date: November 27, 2008
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20080290458
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having at least one metal wiring level within the substrate; an insulative layer on a surface of the substrate; an inductor within the insulative layer; and a wire bond pad within the insulative layer. The inductor and the wire bond pad are substantially co-planar. The inductor has a height greater than a height of the wire bond pad.
    Type: Application
    Filed: July 10, 2008
    Publication date: November 27, 2008
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20080293233
    Abstract: A method of a semiconductor device. A substrate is provided. At least one metal wiring level is within the substrate. An insulative layer is deposited on a surface of the substrate. An inductor is formed within the insulative layer using a patterned plate process. A wire bond pad is formed within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
    Type: Application
    Filed: July 10, 2008
    Publication date: November 27, 2008
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20080277759
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above a top surface of the substrate; an insulative layer on and above a top surface of the capping layer; an inductor comprising a first portion in and above the insulative layer and a second portion only above the insulative layer; and a wire bond pad within the insulative layer, wherein the first portion the inductor has a height in a first direction greater than a height of the wire bond pad in the first direction, wherein the first direction is perpendicularly directed from the top surface of substrate toward the insulative layer.
    Type: Application
    Filed: July 16, 2008
    Publication date: November 13, 2008
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Publication number: 20080272458
    Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above the substrate; an insulative layer on and above the capping layer; a first layer of photo-imagable material on and above the insulative layer; a layer of oxide on and above the first layer of photo-imagable material; a second layer of photo-imagable material on and above the layer of oxide; an inductor; and a wire bond pad. A first portion of the inductor is in the second layer of photo-imagable material, the layer of oxide, the first layer of photo-imagable material, the insulative layer, and the capping layer. A second portion of the inductor is in only the second layer of photo-imagable material. The wire bond pad in only the first layer of photo-imagable material, the insulative layer, and the capping layer.
    Type: Application
    Filed: July 16, 2008
    Publication date: November 6, 2008
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
  • Patent number: 7361950
    Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by sidewall spacers.
    Type: Grant
    Filed: September 12, 2005
    Date of Patent: April 22, 2008
    Assignee: International Business Machines Corporation
    Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed