Patents by Inventor Anil Kumar Chinthakindi
Anil Kumar Chinthakindi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7915134Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by side wall spacers.Type: GrantFiled: January 8, 2008Date of Patent: March 29, 2011Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7763954Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having at least one metal wiring level within the substrate; an insulative layer on a surface of the substrate; an inductor within the insulative layer; and a wire bond pad within the insulative layer. The inductor and the wire bond pad are substantially co-planar. The inductor has a height greater than a height of the wire bond pad.Type: GrantFiled: July 10, 2008Date of Patent: July 27, 2010Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7741698Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above a top surface of the substrate; an insulative layer on and above a top surface of the capping layer; an inductor comprising a first portion in and above the insulative layer and a second portion only above the insulative layer; and a wire bond pad within the insulative layer, wherein the first portion the inductor has a height in a first direction greater than a height of the wire bond pad in the first direction, wherein the first direction is perpendicularly directed from the top surface of substrate toward the insulative layer.Type: GrantFiled: July 16, 2008Date of Patent: June 22, 2010Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7732295Abstract: A method of forming a semiconductor substrate. A substrate is provided. At least one metal wiring level is within the substrate. A first insulative layer is deposited on a surface of the substrate. A portion of a wire bond pad is formed within the first insulative layer. A second insulative layer is deposited on the first insulative layer. An inductor is within the second insulative layer using a patterned plate process. A remaining portion of the wire bond pad is formed within the second insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.Type: GrantFiled: July 10, 2008Date of Patent: June 8, 2010Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7732294Abstract: A method of a semiconductor device. A substrate is provided. At least one metal wiring level is within the substrate. An insulative layer is deposited on a surface of the substrate. An inductor is formed within the insulative layer using a patterned plate process. A wire bond pad is formed within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.Type: GrantFiled: July 10, 2008Date of Patent: June 8, 2010Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7713792Abstract: A fuse structure, a method for fabricating the fuse structure and a method for programming a fuse within the fuse structure each use a fuse material layer that is used as a fuse, and located upon a monocrystalline semiconductor material layer in turn located over a substrate. At least part of the monocrystalline semiconductor material layer is separated from the substrate by a gap. Use of the monocrystalline semiconductor material layer, as well as the gap, provides for enhanced uniformity and reproducibility when programming the fuse.Type: GrantFiled: October 10, 2007Date of Patent: May 11, 2010Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Deok-Kee Kim, Chandrasekharan Kothandaraman, Byeongju Park
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Patent number: 7573117Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above the substrate; an insulative layer on and above the capping layer; a first layer of photo-imagable material on and above the insulative layer; a layer of oxide on and above the first layer of photo-imagable material; a second layer of photo-imagable material on and above the layer of oxide; an inductor; and a wire bond pad. A first portion of the inductor is in the second layer of photo-imagable material, the layer of oxide, the first layer of photo-imagable material, the insulative layer, and the capping layer. A second portion of the inductor is in only the second layer of photo-imagable material. The wire bond pad in only the first layer of photo-imagable material, the insulative layer, and the capping layer.Type: GrantFiled: July 16, 2008Date of Patent: August 11, 2009Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20090096059Abstract: A fuse structure, a method for fabricating the fuse structure and a method for programming a fuse within the fuse structure each use a fuse material layer that is used as a fuse, and located upon a monocrystalline semiconductor material layer in turn located over a substrate. At least part of the monocrystalline semiconductor material layer is separated from the substrate by a gap. Use of the monocrystalline semiconductor material layer, as well as the gap, provides for enhanced uniformity and reproducibility when programming the fuse.Type: ApplicationFiled: October 10, 2007Publication date: April 16, 2009Applicant: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Deok-kee Kim, Chandrasekharan Kothandaraman, Byeongju Park
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Publication number: 20090004809Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by side wall spacers.Type: ApplicationFiled: January 8, 2008Publication date: January 1, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20080293210Abstract: A method of forming a semiconductor substrate. A substrate is provided. At least one metal wiring level is within the substrate. A first insulative layer is deposited on a surface of the substrate. A portion of a wire bond pad is formed within the first insulative layer. A second insulative layer is deposited on the first insulative layer. An iductor is within the second insulative layer using a patterned plate process. A remaining portion of the wire bond pad is formed within the second insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.Type: ApplicationFiled: July 10, 2008Publication date: November 27, 2008Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20080290458Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having at least one metal wiring level within the substrate; an insulative layer on a surface of the substrate; an inductor within the insulative layer; and a wire bond pad within the insulative layer. The inductor and the wire bond pad are substantially co-planar. The inductor has a height greater than a height of the wire bond pad.Type: ApplicationFiled: July 10, 2008Publication date: November 27, 2008Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20080293233Abstract: A method of a semiconductor device. A substrate is provided. At least one metal wiring level is within the substrate. An insulative layer is deposited on a surface of the substrate. An inductor is formed within the insulative layer using a patterned plate process. A wire bond pad is formed within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.Type: ApplicationFiled: July 10, 2008Publication date: November 27, 2008Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20080277759Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above a top surface of the substrate; an insulative layer on and above a top surface of the capping layer; an inductor comprising a first portion in and above the insulative layer and a second portion only above the insulative layer; and a wire bond pad within the insulative layer, wherein the first portion the inductor has a height in a first direction greater than a height of the wire bond pad in the first direction, wherein the first direction is perpendicularly directed from the top surface of substrate toward the insulative layer.Type: ApplicationFiled: July 16, 2008Publication date: November 13, 2008Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Publication number: 20080272458Abstract: A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above the substrate; an insulative layer on and above the capping layer; a first layer of photo-imagable material on and above the insulative layer; a layer of oxide on and above the first layer of photo-imagable material; a second layer of photo-imagable material on and above the layer of oxide; an inductor; and a wire bond pad. A first portion of the inductor is in the second layer of photo-imagable material, the layer of oxide, the first layer of photo-imagable material, the insulative layer, and the capping layer. A second portion of the inductor is in only the second layer of photo-imagable material. The wire bond pad in only the first layer of photo-imagable material, the insulative layer, and the capping layer.Type: ApplicationFiled: July 16, 2008Publication date: November 6, 2008Inventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, John Edward Florkey, Jeffrey Peter Gambino, Zhong-Xiang He, Anthony Kendall Stamper, Kunal Vaed
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Patent number: 7361950Abstract: A MIM capacitor is formed on a semiconductor substrate having a top surface and including regions formed in the surface selected from a Shallow Trench Isolation (STI) region and a doped well having exterior surfaces coplanar with the semiconductor substrate. A capacitor lower plate is either a lower electrode formed on the STI region in the semiconductor substrate or a lower electrode formed by a doped well formed in the top surface of the semiconductor substrate that may have a silicide surface. A capacitor HiK dielectric layer is formed on or above the lower plate. A capacitor second plate is formed on the HiK dielectric layer above the capacitor lower plate. A dual capacitor structure with a top plate may be formed above the second plate with vias connected to the lower plate protected from the second plate by sidewall spacers.Type: GrantFiled: September 12, 2005Date of Patent: April 22, 2008Assignee: International Business Machines CorporationInventors: Anil Kumar Chinthakindi, Douglas Duane Coolbaugh, Keith Edward Downes, Ebenezer E. Eshun, Zhong-Xiang He, Robert Mark Rassel, Anthony Kendall Stamper, Kunal Vaed