Patents by Inventor Anil Kumar Kalal

Anil Kumar Kalal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
    Publication number: 20220139679
    Abstract: A plasma chamber includes a chamber body having a processing region therewithin, a liner disposed on the chamber body, the liner surrounding the processing region, a substrate support disposed within the liner, a magnet assembly comprising a plurality of magnets disposed around the liner, and a magnetic-material shield disposed around the liner, the magnetic-material shield encapsulating the processing region near the substrate support.
    Type: Application
    Filed: November 3, 2020
    Publication date: May 5, 2022
    Inventors: Job George KONNOTH JOSEPH, Sathya Swaroop GANTA, Kallol BERA, Andrew NGUYEN, Jay D. PINSON, II, Akshay DHANAKSHIRUR, Kaushik Comandoor ALAYAVALLI, Canfeng LAI, Ren-Guan DUAN, Jennifer Y. SUN, Anil Kumar KALAL, Abhishek PANDEY
  • ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL
    Publication number: 20220005723
    Abstract: Embodiments of the disclosure provide electrostatic chucks for securing substrates during processing. Some embodiments of this disclosure provide methods and apparatus for increased temperature control across the radial profile of the substrate. Some embodiments of the disclosure provide methods and apparatus for providing control of hydrogen concentration in processed films during a high-density plasma (HDP) process.
    Type: Application
    Filed: July 6, 2021
    Publication date: January 6, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir R. Gondhalekar, Wendell Glenn Boyd, JR., Badri Ramamurthi, Shekhar Athani, Anil Kumar Kalal, Jay Dee Pinson, II