Patents by Inventor Aniruddha S. Worlikar

Aniruddha S. Worlikar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-purity crystal growth
    Patent number: 7377977
    Abstract: A method of growing a crystal on a substrate disposed in a reactor, that provides a reactor chamber in which the substrate is disposed, includes flowing reactive gases inside the reactor chamber toward the substrate, the reactive gases comprising components that are able to bond to each other to form the crystal, and flowing buffer gas in the reactor chamber between the reactive gases and a wall of the reactor, where the flowing buffer gas inhibits at least one of a first material at least one of in and produced by the reactive gases from reaching the reactor wall and a second material produced by the reactor wall from reaching the reactive gases in the reactor chamber before the reactive gases reach the substrate.
    Type: Grant
    Filed: May 30, 2006
    Date of Patent: May 27, 2008
    Assignee: Cape Simulations, Inc.
    Inventors: Shariar Motakef, Aniruddha S. Worlikar
  • High-purity crystal growth
    Patent number: 7052546
    Abstract: A method of growing a crystal on a substrate disposed in a reactor, that provides a reactor chamber in which the substrate is disposed, includes flowing reactive gases inside the reactor chamber toward the substrate, the reactive gases comprising components that are able to bond to each other to form the crystal, and flowing buffer gas in the reactor chamber between the reactive gases and a wall of the reactor, where the flowing buffer gas inhibits at least one of a first material at least one of in and produced by the reactive gases from reaching the reactor wall and a second material produced by the reactor wall from reaching the reactive gases in the reactor chamber before the reactive gases reach the substrate.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: May 30, 2006
    Assignee: Cape Simulations, Inc.
    Inventors: Shariar Motakef, Aniruddha S. Worlikar