Patents by Inventor Anirudh ANAND

Anirudh ANAND has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TEMPERATURE MEASUREMENT OF OPTICAL ELEMENTS IN AN OPTICAL APPARATUS
    Publication number: 20250085172
    Abstract: An optical apparatus is disclosed, the apparatus comprising an optical element having a reflective surface for reflecting incident radiation in a beam path, and at least one sensor configured to sense radiation corresponding to a temperature of a respective portion of a backside surface of the optical element. Also disclosed is a method of controlling a temperature of a reflective surface of an optical element in a lithographic apparatus.
    Type: Application
    Filed: March 29, 2022
    Publication date: March 13, 2025
    Applicant: ASML Netherland B.V.
    Inventors: Koen Martin Willem Jan BOS, Joost André KLUGKIST, Anirudh ANAND
  • TEMPERATURE MEASUREMENT OF OPTICAL ELEMENTS IN AN OPTICAL APPARATUS
    Publication number: 20240201029
    Abstract: An optical apparatus is disclosed, the apparatus comprising an optical element having a reflective surface for reflecting incident radiation in a beam path, and at least one sensor configured to sense radiation corresponding to a temperature of a respective portion of a backside surface of the optical element. Also disclosed is a method of controlling a temperature of a reflective surface of an optical element in a lithographic apparatus.
    Type: Application
    Filed: March 29, 2022
    Publication date: June 20, 2024
    Applicant: ASML Netherland B.V.
    Inventors: Koen Martin Willem Jan BOS, Joost André KLUGKIST, Anirudh ANAND