Patents by Inventor Anja Schauer

Anja Schauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for performing an aerial image simulation of a photolithographic mask
    Patent number: 11366382
    Abstract: The present invention refers to a method for performing an aerial image simulation of a photolithographic mask which comprises the following steps: (a) modifying an optical radiation distribution at a patterned surface of the photolithographic mask, depending on at least one first arrangement of pixels to be generated in the photolithographic mask; and (b) performing the aerial image simulation of the photolithographic mask by using the generated modified optical radiation distribution.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: June 21, 2022
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss SMS Ltd
    Inventors: Vladimir Dmitriev, Joachim Welte, Bernd Geh, Paul Graeupner, Anja Schauer
  • METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A PHOTOLITHOGRAPHIC MASK
    Publication number: 20210263406
    Abstract: The present invention refers to a method for performing an aerial image simulation of a photolithographic mask which comprises the following steps: (a) modifying an optical radiation distribution at a patterned surface of the photolithographic mask, depending on at least one first arrangement of pixels to be generated in the photolithographic mask; and (b) performing the aerial image simulation of the photolithographic mask by using the generated modified optical radiation distribution.
    Type: Application
    Filed: February 24, 2020
    Publication date: August 26, 2021
    Inventors: Vladimir Dmitriev, Joachim Welte, Bernd Geh, Paul Graeupner, Anja Schauer