Patents by Inventor Ankit Vora

Ankit Vora has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170233532
    Abstract: A high-chi diblock copolymer (BCP) for self-assembly comprises a first block comprising repeat units of trimethylsilyl styrene (TMSS) and styrene, and a second block comprising an aliphatic carbonate repeat unit. The blocks are linked together by a fluorinated junction group L? in which none of the fluorines of L? are covalently bound to an atomic center of the polymer backbone. A top-coat free film layer comprising the BCP, which is disposed on an underlayer and in contact with an atmosphere, is capable of forming a perpendicularly oriented lamellar domain pattern on an underlayer that is preferential or non-preferential to the domains of the block copolymer. The domain pattern can be selectively etched to provide a relief pattern comprising a remaining domain. The relief pattern having good critical dimensional uniformity compared to an otherwise identical polymer lacking the silicon.
    Type: Application
    Filed: February 11, 2016
    Publication date: August 17, 2017
    Inventors: Noel Arellano, Teddie P. Magbitang, Daniel P. Sanders, Kristin Schmidt, Ankit Vora
  • Publication number: 20170144113
    Abstract: A thin film composite membrane includes an active layer on a support membrane, wherein the active layer includes at least two chemically distinct first and second crosslinked polyamide film sub-layers. The first film sub-layer includes a polyamide unit; and the second film sub-layer includes a copolyamide with two chemically distinct polyamide units. The first film sub-layer is closer to the support than is the second film sub-layer.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Inventors: Radwan A. Alrasheed, Blake W. Davis, Jacquana T. Diep, Geraud J. Dubois, Young-Hye Na, Majed S. Nassar, Ankit Vora
  • Publication number: 20170114183
    Abstract: Block polymers are formed by ring opening polymerization (ROP) of a cyclic carbonate monomer using a polymeric initiator for the ROP that comprises repeating functionalized ethylene units. The block polymers are free of, or substantially free of, any polymer having a chemical structure that does not comprise the polymer backbone of the polymeric initiator. The block polymers are capable of directed self-assembly.
    Type: Application
    Filed: January 3, 2017
    Publication date: April 27, 2017
    Inventors: Anindarupa Chunder, Daniel P. Sanders, Ankit Vora
  • Publication number: 20170114246
    Abstract: Block copolymers (BCPs) for self-assembly applications comprise a linear fluorinated linking group L? joining a pair of adjacent blocks. A film layer comprising a BCP, which is disposed on an underlayer and in contact with an atmosphere, is capable of forming a perpendicularly oriented domain pattern when the underlayer is preferentially wetted by one domain of an otherwise identical self-assembled BCP in which all fluorines of L? are replaced by hydrogen. The BCP can be a low-chi or high-chi BCP. In a preferred embodiment, the BCP comprises a styrene-based first block, and a second block comprises a carbonate and/or ester repeat unit formed by ring opening polymerization of a cyclic carbonate and/or cyclic ester monomer. The linking group L? has a lower surface energy than each of the polymer blocks.
    Type: Application
    Filed: October 21, 2015
    Publication date: April 27, 2017
    Inventors: Noel Arellano, Joy Cheng, Teddie P. Magbitang, Jed W. Pitera, Daniel P. Sanders, Kristin Schmidt, Hoa D. Truong, Ankit Vora
  • Publication number: 20170066853
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0 Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Application
    Filed: November 21, 2016
    Publication date: March 9, 2017
    Inventors: Joy Cheng, Anindarupa Chunder, Ankit Vora
  • Patent number: 9579608
    Abstract: A polymeric membrane includes an active layer over a support, wherein the active layer includes at least two chemically distinct polyamide films. A first one of the films is in contact with the support, and a second one of the films is not in contact with the support. The second polyamide film is crosslinked with the first polyamide film at an interface therewith, and the second polyamide film includes a structure having a side chain group including an ammonium salt.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: February 28, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Young-Hye Na, Ratnam Sooriyakumaran, Ankit Vora
  • Patent number: 9574107
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Grant
    Filed: February 16, 2015
    Date of Patent: February 21, 2017
    Assignee: International Business Machines Corporation
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Patent number: 9562127
    Abstract: Block polymers are formed by ring opening polymerization (ROP) of a cyclic carbonate monomer using a polymeric initiator for the ROP that comprises repeating functionalized ethylene units. The block polymers are free of, or substantially free of, any polymer having a chemical structure that does not comprise the polymer backbone of the polymeric initiator. The block polymers are capable of directed self-assembly.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: February 7, 2017
    Assignee: International Business Machines Corporation
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Patent number: 9561474
    Abstract: A thin film composite membrane includes an active layer on a support membrane, wherein the active layer includes at least two chemically distinct first and second crosslinked polyamide film sub-layers. The first film sub-layer includes a polyamide unit; and the second film sub-layer includes a copolyamide with two chemically distinct polyamide units. The first film sub-layer is closer to the support than is the second film sub-layer.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: February 7, 2017
    Assignee: International Business Machines Corporation
    Inventors: Radwan A. Alrasheed, Blake W. Davis, Jacquana T. Diep, Geraud J. Dubois, Young-Hye Na, Majed S. Nassar, Ankit Vora
  • Patent number: 9556353
    Abstract: An orientation control layer (OCL) for self-assembly of block copolymers comprises a random copolymer comprising a first repeat unit having an ethylenic backbone functional group and a side chain aromatic ring, a second repeat unit comprising an ethylenic backbone functional group and a side chain polycarbonate, and a third repeat unit comprising an ethylenic backbone functional group and a side chain ester or amide bearing an active group capable of forming a covalent bond with a substrate surface (e.g., a silicon wafer). The OCLs are neutral wetting to block copolymers having a high Flory-Huggins interaction parameter chi (?) (“high-chi” block copolymers) such as a block copolymer comprising a polystyrene block and a polycarbonate block. The neutral OCL wetting properties allow for formation of lamellar domain patterns of the self-assembled high-chi block copolymers to be oriented perpendicular to the OCL surface.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: January 31, 2017
    Assignee: International Business Machines Corporation
    Inventors: Joy Cheng, Anindarupa Chunder, Melia Tjio, Ankit Vora
  • Publication number: 20160362513
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a styrene-based block). The SAP comprises a hydrophobic fluorinated first repeat unit and a non-fluorinated second repeat unit bearing at least one pendent OH group present as an alcohol or acid (e.g., carboxylic acid). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Application
    Filed: August 29, 2016
    Publication date: December 15, 2016
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Ankit Vora
  • Publication number: 20160304740
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a styrene-based block). The SAP comprises a hydrophobic fluorinated first repeat unit and a non-fluorinated second repeat unit bearing at least one pendent OH group present as an alcohol or acid (e.g., carboxylic acid). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Application
    Filed: April 15, 2015
    Publication date: October 20, 2016
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Patent number: 9458353
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a styrene-based block). The SAP comprises a hydrophobic fluorinated first repeat unit and a non-fluorinated second repeat unit bearing at least one pendent OH group present as an alcohol or acid (e.g., carboxylic acid). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Grant
    Filed: April 15, 2015
    Date of Patent: October 4, 2016
    Assignee: International Business Machines Corporation
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Publication number: 20160244557
    Abstract: The present invention relates to a novel block copolymer of structure 1, wherein, A- is a block polymer chain, B is a block polymer chain, wherein, A- and B- are chemically different, covalently connected polymer chains, which are phase separable and the moiety X(Y(Z)b)a is a junction group, which comprises a surface active pendant moiety Y(Z)b wherein: a is an integer from 1 to 4 denoting the number of surface active pendant moieties Y(Z)b on X, b is an integer from 1 to 5 denoting the number of Z moieties on the linking moiety Y, X is a linking group between the A polymer block, the B polymer block and the moiety Y, Y is a linking group or a direct valence bond between X and Z; and Z is a moiety independently selected from, a fluorine containing moiety, a Si1-Si8 siloxane containing moiety or a hydrocarbon moiety with at least 18 carbons, and further wherein the junction group X(Y(Z)b)a has a surface energy less than that that of the block A and less than that of the block B.
    Type: Application
    Filed: February 20, 2015
    Publication date: August 25, 2016
    Applicants: International Business Machines Corporation
    Inventors: Ankit VORA, Eri HIRAHARA, Joy CHENG, Durairaj BASKARAN, Orest POLISHCHUK, Melia TJIO, Margareta PAUNESCU, Daniel SANDERS, Guanyang LIN
  • Publication number: 20160237307
    Abstract: A film layer comprising a high-chi (?) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
    Type: Application
    Filed: February 16, 2015
    Publication date: August 18, 2016
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Patent number: 9352286
    Abstract: A method comprises disposing, on a porous support membrane, an aqueous mixture comprising a crosslinkable polymer comprising a poly(meth)acrylate and/or poly(meth)acrylamide backbone, thereby forming an initial film layer, wherein the crosslinkable polymer comprises a side chain nucleophilic amine group capable of interfacially reacting with a multi-functional acid halide crosslinking agent to form a crosslinked polymer; contacting the initial film layer with a mixture comprising i) the multi-functional acid halide crosslinking agent, ii) an optional accelerator, and iii) an organic solvent, the organic solvent being a non-solvent for the crosslinkable polymer; and allowing the crosslinkable polymer to interfacially react with the crosslinking agent, thereby forming a composite filtration membrane comprising an anti-fouling selective layer comprising the crosslinked polymer.
    Type: Grant
    Filed: April 5, 2014
    Date of Patent: May 31, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Young-Hye Na, Alshakim Nelson, Ratnam Sooriyakumaran, Ankit Vora
  • Patent number: 9333465
    Abstract: A polymeric membrane on a support, wherein the polymeric membrane includes a crosslinked polymer covalently bound to a molecular cage compound. An interfacial polymerization method for making the polymeric membrane is also disclosed.
    Type: Grant
    Filed: October 1, 2014
    Date of Patent: May 10, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jacquana T. Diep, Young-Hye Na, Ratnam Sooriyakumaran, Ankit Vora
  • Publication number: 20160122571
    Abstract: An orientation control layer (OCL) for self-assembly of block copolymers comprises a random copolymer comprising a first repeat unit having an ethylenic backbone functional group and a side chain aromatic ring, a second repeat unit comprising an ethylenic backbone functional group and a side chain polycarbonate, and a third repeat unit comprising an ethylenic backbone functional group and a side chain ester or amide bearing an active group capable of forming a covalent bond with a substrate surface (e.g., a silicon wafer). The OCLs are neutral wetting to block copolymers having a high Flory-Huggins interaction parameter chi (?) (“high-chi” block copolymers) such as a block copolymer comprising a polystyrene block and a polycarbonate block. The neutral OCL wetting properties allow for formation of lamellar domain patterns of the self-assembled high-chi block copolymers to be oriented perpendicular to the OCL surface.
    Type: Application
    Filed: October 29, 2014
    Publication date: May 5, 2016
    Inventors: Joy Cheng, Anindarupa Chunder, Melia Tjio, Ankit Vora
  • Publication number: 20150329664
    Abstract: Block polymers are formed by ring opening polymerization (ROP) of a cyclic carbonate monomer using a polymeric initiator for the ROP that comprises repeating functionalized ethylene units. The block polymers are free of, or substantially free of, any polymer having a chemical structure that does not comprise the polymer backbone of the polymeric initiator. The block polymers are capable of directed self-assembly.
    Type: Application
    Filed: May 16, 2014
    Publication date: November 19, 2015
    Applicant: International Business Machines Corporation
    Inventors: Joy Cheng, Anindarupa Chunder, Daniel P. Sanders, Melia Tjio, Ankit Vora
  • Publication number: 20150202575
    Abstract: A polymeric membrane includes an active layer over a support, wherein the active layer includes at least two chemically distinct polyamide films. A first one of the films is in contact with the support, and a second one of the films is not in contact with the support. The second polyamide film is crosslinked with the first polyamide film at an interface therewith, and the second polyamide film includes a structure having a side chain group including an ammonium salt.
    Type: Application
    Filed: March 31, 2015
    Publication date: July 23, 2015
    Inventors: Young-Hye Na, Ratnam Sooriyakumaran, Ankit Vora