Patents by Inventor Anna Catharina VERKAIK

Anna Catharina VERKAIK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stage apparatus and method for calibrating an object loading process
    Patent number: 11556064
    Abstract: The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: January 17, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Gijs Kramer, Theodorus Marcus Nagtegaal, André Schreuder, Anna Catharina Verkaik
  • STAGE APPARATUS AND METHOD FOR CALIBRATING AN OBJECT LOADING PROCESS
    Publication number: 20210311403
    Abstract: The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.
    Type: Application
    Filed: July 22, 2019
    Publication date: October 7, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Gijs KRAMER, Theodorus marcus NAGTEGAAL, André SCHREUDER, Anna Catharina VERKAIK