Abstract: A process for manufacturing a combined microelectromechanical device envisages: forming, in a sensor wafer, at least a first and a second microelectromechanical structures, at a main surface; forming, in a cap wafer, at least a first and a second cavities, at a respective main surface; forming a getter region inside the first cavity; bonding the main surfaces of the sensor and cap wafers by means of a bonding region, to define a first and a second hermetic environments for the microelectromechanical structures at different pressure values. A raised frame is formed, before the bonding step, in such a way as to be located around the first cavity; the bonding region determines the bonding of the sensor and cap wafers at the raised frame and the definition of the first hermetic environment associated with the first cavity, in a time interval prior to hermetic closure of the second cavity.

Abstract: MEMS device having a substrate of semiconductor material; a first structural layer of semiconductor material, on the substrate; a second structural layer of semiconductor material, on the first structural layer; an active portion, accommodating active structures formed in the first structural layer and/or in the second structural layer; a connection portion, accommodating a plurality of connection structures and arranged laterally to the active portion; and a plurality of conductive regions, arranged on the substrate and extending between the active portion and the connection portion. Each connection structure is formed by a first connection portion, in electrical contact with a respective conductive region and formed in the first structural layer, and by a second connection portion, on the first connection portion and in electrical continuity therewith, the second connection portion formed in the second structural layer. The first connection portion has a greater thickness than the second connection portion.

Abstract: A delivery device for fluid products including a plurality of containers, to contain a predetermined fluid and connected to an associated delivery unit provided with a piston unit. The device also includes a support on which the containers are mounted. The support rotates to position sequentially, at different moments of time according to one or more predetermined sequences, at least some of the delivery units in a predetermined delivery seating, to deliver corresponding quantities of fluid to obtain a desired fluid composition. Each delivery unit is provided with at least a disk type delivery valve, able to be activated between at least two distinct open conditions and a closed condition.

Abstract: A delivery device for fluid products including a plurality of containers, each able to contain a predetermined fluid and connected to an associated delivery unit. The device also includes a support on which the containers are mounted, able to rotate to position sequentially, at different moments of time according to one or more predetermined sequences, at least some of the delivery units in a predetermined delivery seating, to deliver corresponding quantities of fluid to obtain a desired fluid composition. The delivery device contains stirrers, associated with the containers to mix the fluids contained in the containers. At least some of the stirrers are able to be selectively activated, independently of each other, to maintain the corresponding fluid in optimum conditions to allow an efficient delivery by the corresponding delivery unit disposed in the delivery seating.