Patents by Inventor Anna Lena Eberle

Anna Lena Eberle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of imaging a 2D sample with a multi-beam particle microscope
    Patent number: 11521827
    Abstract: A fast method of imaging a 2D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 2D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: December 6, 2022
    Inventors: Dirk Zeidler, Anna Lena Eberle
  • METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
    Publication number: 20210351001
    Abstract: A fast method of imaging a 2D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 2D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
    Type: Application
    Filed: May 25, 2021
    Publication date: November 11, 2021
    Inventors: Dirk Zeidler, Anna Lena Eberle
  • Method of imaging a 3D sample with a multi-beam particle microscope
    Patent number: 11069508
    Abstract: A fast method of imaging a 3D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 3D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 3D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: July 20, 2021
    Assignee: Carl Zeiss MultiSEM GmbH
    Inventors: Dirk Zeidler, Anna Lena Eberle
  • METHOD OF IMAGING A 3D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
    Publication number: 20200243300
    Abstract: A fast method of imaging a 3D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 3D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 3D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
    Type: Application
    Filed: January 6, 2020
    Publication date: July 30, 2020
    Inventors: Dirk Zeidler, Anna Lena Eberle