Patents by Inventor Anna Lio

Anna Lio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for double patterning photoresist
    Publication number: 20090263751
    Abstract: Embodiments of methods for double patterning photoresist are generally described herein. Other embodiments may be described and claimed.
    Type: Application
    Filed: April 22, 2008
    Publication date: October 22, 2009
    Inventors: Swaminathan Sivakumar, Anna Lio, Elliot Tan, Charles Wallace, Anant Jahagirdar