Patents by Inventor Anna Schott

Anna Schott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Zirconium oxide based sputtering target
    Patent number: 10347472
    Abstract: The present invention relates to a sputtering target, which comprises a zirconium oxide as a sputtering material, wherein the zirconium oxide has an oxygen deficiency, compared to the oxygen content of its fully oxidized form, of at least 0.40 wt %, has a total amount of metal elements other than zirconium of less than 3.0 wt %, based on the total amounts of metal elements including zirconium, and has an X-ray powder diffraction pattern having a peak P1 at 28.2°+/?0.2° 2-theta, a peak P2 at 31.4°+/?0.2° 2-theta, and a peak P3 at 30.2°+/?0.2° 2-theta.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: July 9, 2019
    Assignee: MATERION ADVANCED MATERIALS GERMANY GMBH
    Inventors: Christoph Simons, Andreas Herzog, Markus Schultheis, Anna Schott
  • ZIRCONIUM OXIDE BASED SPUTTERING TARGET
    Publication number: 20180155820
    Abstract: The present invention relates to a sputtering target, which comprises a zirconium oxide as a sputtering material, wherein the zirconium oxide has an oxygen deficiency, compared to the oxygen content of its fully oxidized form, of at least 0.40 wt %, has a total amount of metal elements other than zirconium of less than 3.0 wt %, based on the total amounts of metal elements including zirconium, and has an X-ray powder diffraction pattern having a peak P1 at 28.2°+/?0.2° 2-theta, a peak P2 at 31.4°+/?0.2° 2-theta, and a peak P3 at 30.2°+/?0.2° 2-theta.
    Type: Application
    Filed: December 1, 2017
    Publication date: June 7, 2018
    Inventors: Christoph Simons, Andreas Herzog, Markus Schultheis, Anna Schott