Patents by Inventor Anne Marie Ebert

Anne Marie Ebert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Highly scalable trench capacitor
    Patent number: 8492817
    Abstract: An improved trench structure, and method for its fabrication are disclosed. Embodiments of the present invention provide a trench in which the collar portion has an air gap instead of a solid oxide collar. The air gap provides a lower dielectric constant. Embodiments of the present invention can therefore be used to make higher-performance devices (due to reduced parasitic leakage), or smaller devices, due to the ability to use a thinner collar to achieve the same performance as a thicker collar comprised only of oxide (with no air gap). Alternatively, a design choice can be made to achieve a combination of improved performance and reduced size, depending on the application.
    Type: Grant
    Filed: January 19, 2010
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Anne Marie Ebert, Johnathan E. Faltermeier
  • HIGHLY SCALABLE TRENCH CAPACITOR
    Publication number: 20100207245
    Abstract: An improved trench structure, and method for its fabrication are disclosed. Embodiments of the present invention provide a trench in which the collar portion has an air gap instead of a solid oxide collar. The air gap provides a lower dielectric constant. Embodiments of the present invention can therefore be used to make higher-performance devices (due to reduced parasitic leakage), or smaller devices, due to the ability to use a thinner collar to achieve the same performance as a thicker collar comprised only of oxide (with no air gap). Alternatively, a design choice can be made to achieve a combination of improved performance and reduced size, depending on the application.
    Type: Application
    Filed: January 19, 2010
    Publication date: August 19, 2010
    Applicant: International Business Machines Corporation
    Inventors: Kangguo Cheng, Anne Marie Ebert, Johnathan E. Faltermeier