Patents by Inventor Anne Marie PASTOL

Anne Marie PASTOL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment mark positioning in a lithographic process
    Patent number: 11294294
    Abstract: Methods and apparatuses for determining a position of an alignment mark applied to a region of a first layer on a substrate using a lithographic process by: obtaining an expected position of the alignment mark; obtaining a geometrical deformation of the region due to a control action correcting the lithographic process; obtaining a translation of the alignment mark due to the geometrical deformation; and determining the position of the alignment mark based on the expected position and the translation.
    Type: Grant
    Filed: February 6, 2019
    Date of Patent: April 5, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Richard Johannes Franciscus Van Haren, Leon Paul Van Dijk, Orion Jonathan Pierre Mouraille, Anne Marie Pastol
  • ALIGNMENT MARK POSITIONING IN A LITHOGRAPHIC PROCESS
    Publication number: 20210048758
    Abstract: Methods and apparatuses for determining a position of an alignment mark applied to a region of a first layer on a substrate using a lithographic process by: obtaining an expected position of the alignment mark; obtaining a geometrical deformation of the region due to a control action correcting the lithographic process; obtaining a translation of the alignment mark due to the geometrical deformation; and determining the position of the alignment mark based on the expected position and the translation.
    Type: Application
    Filed: February 6, 2019
    Publication date: February 18, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Richard Johannes Franciscus VAN HAREN, Leon Paul VAN DIJK, Orion Jonathan Pierre MOURAILLE, Anne Marie PASTOL