Patents by Inventor Annie I-Jen Wang
Annie I-Jen Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10256596Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: GrantFiled: April 27, 2016Date of Patent: April 9, 2019Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey Hastings Lang, Apoorva Murarka, Annie I-Jen Wang, Wendi Chang
-
Patent number: 9991076Abstract: Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored.Type: GrantFiled: January 28, 2014Date of Patent: June 5, 2018Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey H. Lang, Hae-Seung Lee, Timothy M. Swager, Trisha L. Andrew, Matthew Eric D'Asaro, Parag Deotare, Apoorva Murarka, Farnaz Niroui, Ellen Sletten, Annie I-Jen Wang
-
Publication number: 20160380404Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: ApplicationFiled: April 27, 2016Publication date: December 29, 2016Inventors: Vladimir BULOVIC, Jeffrey Hastings LANG, Apoorva MURARKA, Annie I-Jen WANG, Wendi CHANG
-
Patent number: 9419147Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.Type: GrantFiled: January 9, 2015Date of Patent: August 16, 2016Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey H. Lang, Sarah Paydavosi, Annie I-Jen Wang, Trisha L. Andrew, Apoorva Murarka, Farnaz Niroui, Frank Yaul, Jeffrey C. Grossman
-
Patent number: 9391423Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: GrantFiled: November 13, 2014Date of Patent: July 12, 2016Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey Hastings Lang, Apoorva Murarka, Annie I-Jen Wang, Wendi Chang
-
Patent number: 9352959Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: GrantFiled: November 13, 2014Date of Patent: May 31, 2016Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey Hastings Lang, Annie I-Jen Wang, Apoorva Murarka, Wendi Chang
-
Publication number: 20160130138Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: ApplicationFiled: November 13, 2014Publication date: May 12, 2016Inventors: Vladimir BULOVIC, Jeffrey Hastings LANG, Annie I-Jen WANG, Apoorva MURARKA, Wendi CHANG
-
Publication number: 20150357142Abstract: Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored.Type: ApplicationFiled: January 28, 2014Publication date: December 10, 2015Applicant: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey H. Lang, Hae-Seung Lee, Timothy M. Swager, Trisha L. Andrew, Matthew Eric D'Asaro, Parag Deotare, Apoorva Murarka, Farnaz Niroui, Ellen Sletten, Annie I-Jen Wang
-
Publication number: 20150309306Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable minors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.Type: ApplicationFiled: May 19, 2014Publication date: October 29, 2015Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: Apoorva MURARKA, Vladimir BULOVIC, Annie I-Jen WANG, Jeffrey Hastings LANG
-
Publication number: 20150311664Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.Type: ApplicationFiled: November 13, 2014Publication date: October 29, 2015Inventors: Vladimir BULOVIC, Jeffrey Hastings LANG, Apoorva MURARKA, Annie I-Jen WANG, Wendi CHANG
-
Publication number: 20150268461Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.Type: ApplicationFiled: February 25, 2014Publication date: September 24, 2015Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: Apoorva MURARKA, Vladimir BULOVIC, Annie I-Jen WANG, Jeffrey Hastings LANG
-
Publication number: 20150228916Abstract: The embodiments disclosed herein are directed to optoelectronic devices based, on ultra-thin, lightweight and in-situ deposited parylene substrates, as well as methods of manufacture. Using a bottom-up approach, a readily releasable parylene thin film can be used for fabricating thin film electronic and optoelectronic systems on the thin and light substrates having thicknesses in the nanometer to low micron range. The disclosed method enables the integration of forming a parylene substrate with, the fabrication of a complete photovoltaic device under a fully contained, controlled environment.Type: ApplicationFiled: January 29, 2015Publication date: August 13, 2015Inventors: Vladimir BULOVIC, Joel JEAN, Annie I-Jen WANG
-
Publication number: 20150228805Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.Type: ApplicationFiled: January 9, 2015Publication date: August 13, 2015Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: Vladimir Bulovic, Jeffrey H. Lang, Sarah Paydavosi, Annie I-Jen Wang, Trisha L. Andrew, Apoorva Murarka, Farnaz Niroui, Frank Yaul, Jeffrey C. Grossman
-
Patent number: 8933496Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.Type: GrantFiled: November 7, 2011Date of Patent: January 13, 2015Assignee: Massachusetts Institute of TechnologyInventors: Vladimir Bulovic, Jeffrey H. Lang, Sarah Paydavosi, Annie I-Jen Wang, Trisha L. Andrew, Apoorva Murarka, Farnaz Niroui, Frank Yaul, Jeffrey C. Grossman
-
Publication number: 20120112152Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.Type: ApplicationFiled: November 7, 2011Publication date: May 10, 2012Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: Vladimir Bulovic, Jeffrey H. Lang, Sarah Paydavosi, Annie I-Jen Wang, Trisha L. Andrew, Apoorva Murarka, Farnaz Niroui, Frank Yaul, Jeffrey C. Grossman