Patents by Inventor Annika Rief

Annika Rief has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
    Publication number: 20230228798
    Abstract: A method for measuring an actuator in a projection exposure apparatus for semiconductor lithography, comprises: driving and deflecting a first actuator with a constant control signal; deflecting a further actuator by way of the mechanical coupling; and determining the capacitance of the further actuator, which was deflected by way of the coupling. A projection exposure apparatus for semiconductor lithography comprises a control device and a measuring device, wherein the measuring device is configured to determine the capacitance of at least one actuator in the projection exposure apparatus.
    Type: Application
    Filed: March 24, 2023
    Publication date: July 20, 2023
    Inventors: Markus Raab, Mohammad Awad, Matthias Manger, Bastian Keller, Annika Rief, Daniel Seitz, Alexander Vogler