Patents by Inventor Annlie Sing

Annlie Sing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for etching silicon wafers
    Publication number: 20040108297
    Abstract: A process for etching silicon wafers using a caustic etchant in the form of an aqueous solution comprising water and a source of hydroxide ions and generally characterized by a lower concentration of water and/or higher concentration of source of hydroxide ions. In accordance with another embodiment, the caustic etchant includes a salt additive. The process produces silicon wafers with improved surface characteristics such as flatness and nanotopography.
    Type: Application
    Filed: September 18, 2003
    Publication date: June 10, 2004
    Applicant: MEMC Electronic Materials, Inc.
    Inventors: Henry F. Erk, James R. Capstick, Thomas E. Doane, Alexis Grabbe, Judith A. Schmidt, Annlie Sing, Mark G. Stinson, Guoqiang (David) Zhang