Patents by Inventor Ansgar Freitag

Ansgar Freitag has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical beam guidance system and method for preventing contamination of optical components contained therein
    Patent number: 6824277
    Abstract: A method for reducing the contamination of at least one optical component (2, 3) contained in the beam guidance space (6) and held by a frame (4, 5) defining the beam guidance space and a corresponding optical beam guidance system. The surfaces of the frame bordering on the beam guidance space are at least partially coated with a degassing barrier layer (7) that preferably does not increase reflectivity. The method and system have use, for example, in lithography irradiation systems working with UV light.
    Type: Grant
    Filed: February 22, 2002
    Date of Patent: November 30, 2004
    Assignee: Carl Zeiss SMT AG
    Inventors: Ansgar Freitag, Ulrich Bingel, Josef Distl, Uwe W. Hamm
  • Optical beam guidance system and method for preventing contamination of optical components contained therein
    Publication number: 20020145808
    Abstract: A method for reducing the contamination of at least one optical component (2, 3) contained in the beam guidance space (6) and held by a frame (4, 5) defining the beam guidance space and a corresponding optical beam guidance system. The surfaces of the frame bordering on the beam guidance space are at least partially coated with a degassing barrier layer (7) that preferably does not increase reflectivity. The method and system have use, for example, in lithography irradiation systems working with UV light.
    Type: Application
    Filed: February 22, 2002
    Publication date: October 10, 2002
    Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
    Inventors: Ansgar Freitag, Ulrich Bingel, Josef Distl, Uwe W. Hamm