Abstract: A valve assembly used to control fluid flow rate. The valve assembly comprises a valve plunger and a shield. The valve plunger forces fluid having a flow rate to flow between an inlet and an outlet in response to an applied actuator force. The actuator force is applied to a first side and the fluid is applied to a second side of the valve plunger. The shield minimizes or eliminates a destabilizing force caused by static pressure, created by fluid interaction on the second side. The shield is either coupled to, formed in, or suspended from underneath the valve plunger and extends a length into the outlet. The valve assembly further comprises an orifice between the inlet and the outlet wherein the orifice comprises at least one planar surface and at least one non-planar surface. The shield shields a section of the second side from the fluid.

Abstract: A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.

Abstract: The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (?) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (?) to modify the pressure sensor based mass flow rate.

Abstract: The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (?) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (?) to modify the pressure sensor based mass flow rate.