Patents by Inventor Anthony Barrass

Anthony Barrass has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for chemically etching a workpiece
    Patent number: 9159599
    Abstract: Apparatus for chemically etching a workpiece includes a chamber for receiving a process gas and having a pumping port for extracting exhaust gases, and a workpiece support located in the chamber upstream of the pumping port. The chamber further includes a sub-chamber located upstream of the pumping port and downstream of the workpiece support, and the sub-chamber includes a window and an excitation source, adjacent the window, for creating a plasma in a sample of the exhaust gases to create an optical emission which can be monitored through the window.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: October 13, 2015
    Assignee: SPTS Technologies Limited
    Inventors: Oliver Ansell, Anthony Barrass, Paul Bennett, David Tossell
  • APPARATUS FOR CHEMICALLY ETCHING A WORKPIECE
    Publication number: 20100230049
    Abstract: Apparatus for chemically etching a workpiece includes a chamber for receiving a process gas and having a pumping port for extracting exhaust gases, and a workpiece support located in the chamber upstream of the pumping port. The chamber further includes a sub-chamber located upstream of the pumping port and downstream of the workpiece support, and the sub-chamber includes a window and an excitation source, adjacent the window, for creating a plasma in a sample of the exhaust gases to create an optical emission which can be monitored through the window.
    Type: Application
    Filed: March 12, 2010
    Publication date: September 16, 2010
    Applicant: SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
    Inventors: Oliver Ansell, Anthony Barrass, Paul Bennett, David Tossell