Patents by Inventor Anthony Bernhardt

Anthony Bernhardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5224200
    Abstract: The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.
    Type: Grant
    Filed: November 27, 1991
    Date of Patent: June 29, 1993
    Assignee: The United States of America as represented by the Department of Energy
    Inventors: Paul Rasmussen, Anthony Bernhardt