Patents by Inventor Anthony C. Bonom

Anthony C. Bonom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated system for tool front-end workpiece handling
    Patent number: 7419346
    Abstract: An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
    Type: Grant
    Filed: July 12, 2002
    Date of Patent: September 2, 2008
    Assignee: Asyst Technologies, Inc.
    Inventors: Mark Danna, Roger G. Hine, Anthony C. Bonom
  • Integrated system for tool front-end workpiece handling
    Publication number: 20030091409
    Abstract: An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
    Type: Application
    Filed: July 12, 2002
    Publication date: May 15, 2003
    Inventors: Mark Danna, Roger G. Hine, Anthony C. Bonom