Patents by Inventor Anthony de la LIera

Anthony de la LIera has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DUAL ZONE TEMPERATURE CONTROL OF UPPER ELECTRODES
    Publication number: 20130126476
    Abstract: A system and method of plasma processing includes a plasma chamber including a substrate support and an upper electrode opposite the substrate support, the upper electrode having a plurality of concentric temperature control zones and a controller coupled to the plasma chamber.
    Type: Application
    Filed: March 15, 2012
    Publication date: May 23, 2013
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam, Jim Rogers, Eric Hudson, Gerardo Delgadino, Andrew D. Bailey, III, Mike Kellogg, Anthony de la LIera