Patents by Inventor Anthony Galto

Anthony Galto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENDPOINT WINDOW WITH CONTROLLED TEXTURE SURFACE
    Publication number: 20230166380
    Abstract: A chemical mechanical polishing pad window having a controlled texture surface comprising repeated patterned features. The window results in an improved endpoint detection and in situ rate monitoring by providing consistent values of the ISRMmax-min characteristic over the lifetime of a CMP pad. Also provided is a chemical mechanical polishing pad with the inventive window.
    Type: Application
    Filed: January 30, 2023
    Publication date: June 1, 2023
    Inventors: Paul Andre LEFEVRE, Dustin MILLER, Gary SNIDER, Carlos BARROS, Anthony GALTO
  • ENDPOINT WINDOW WITH CONTROLLED TEXTURE SURFACE
    Publication number: 20220234167
    Abstract: A chemical mechanical polishing pad window having a controlled texture surface comprising repeated patterned features. The window results in an improved endpoint detection and in situ rate monitoring by providing consistent values of the ISRMmax-min characteristic over the lifetime of a CMP pad. Also provided is a chemical mechanical polishing pad with the inventive window.
    Type: Application
    Filed: January 24, 2022
    Publication date: July 28, 2022
    Inventors: Paul Andre LEFEVRE, Dustin Miller, Gary Snider, Carlos Barros, Anthony Galto