Abstract: A composite target cone for use in an X-ray lithography source tube. The composite target cone is multi-layered, having at least an X-ray generating layer formed of platinum, silver, palladium, rhodium, molybdenum, tungsten, silicon, aluminum or copper, and a water-interface layer. The water-interface layer includes a layer of high thermal conductivity material, covered at one side by a layer of high corrosion resistance material and at the other side by a layer of high-melting point material.

Abstract: A laminator for laminating and/or encapsulating a multilayer laminate assembly is disclosed. The laminator includes a processing chamber designed to receive the laminate assembly. The processing chamber is provided with independently controllable temperature, vacuum and pneumatic pressure capabilities for effecting optimum processing conditions for particular materials and configurations. The laminator features a double-vacuum system and a choice between two automatic cycles: a lamination cycle and a lamination-and-cure cycle. Preferably, the laminator is microprocessor controlled and is provided with a control panel where the processing parameters are set and monitored.

Abstract: An integrated system and process for the continuous formation of p-n junctions in solar cells in a cost-effective manner and under computer control. The integrated system essentially comprises an ion beam implanter, an electron beam annealer and a combination vacuum lock-and-wafer transport system, all disposed within a unitary housing maintained under a common vacuum environment.The integrated system employs no wet chemistry operations and, is characterized by high reproducibility and narrow solar cell performance distribution.