Abstract: A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.

Abstract: A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

Abstract: A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

Abstract: A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.

Abstract: A compact navigation system for a rover is provided. The navigation system includes a housing configured to be transported by the rover; a gimbal system having two or more gimbals that includes at least an outer gimbal connected to the housing and an inner gimbal nested in and connected to the outer gimbal; a solid state three-axis gyro assembly mounted on the inner gimbal; a solid state three-axis accelerometer assembly mounted on the inner gimbal; a gyro logic circuit responsive to the three-axis gyro assembly for producing an inertial angular rate about each gyro input axis; an accelerometer logic circuit responsive to the three-axis accelerometer assembly for producing a non-gravitational acceleration along each accelerometer input axis; and a processor responsive to the gyro logic circuits and the accelerometer logic circuits for determining the attitude and the position of the housing to provide for long term accuracy of the attitude and the position for navigation of the rover.