Patents by Inventor Anthony Paul VAN SELOW

Anthony Paul VAN SELOW has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Auto-calibrated process independent feedforward control for processing substrates
    Patent number: 10971384
    Abstract: A substrate processing system to process a substrate includes a sensor to generate sensed values of a parameter of the substrate processing system. An actuator adjusts the parameter of the substrate processing system. A controller communicates with the sensor and the actuator and is configured to process a first substrate using the sensed values to adjust control values for controlling the actuator without feedforward control during a process. The sensed values are delayed and cause instability in the parameter. The controller is further configured to automatically calibrate feedforward values for processing a second substrate based on the sensed values and the control values and process the second substrate while controlling the actuator using the feedforward values.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: April 6, 2021
    Assignee: Lam Research Corporation
    Inventor: Anthony Paul Van Selow
  • AUTO-CALIBRATED PROCESS INDEPENDENT FEEDFORWARD CONTROL
    Publication number: 20200090968
    Abstract: A substrate processing system to process a substrate includes a sensor to generate sensed values of a parameter of a substrate processing system. An actuator adjusts the parameter of the substrate processing system. A controller communicates with the sensor and the actuator and is configured to process a first substrate using the sensed values to adjust control values for controlling the actuator without feedforward control during a process. The sensed values are delayed and cause instability in the parameter. The controller is further configured to automatically calibrate feedforward values for processing a second substrate based on the sensed values and the control values and process the second substrate while controlling the actuator using the feedforward values.
    Type: Application
    Filed: September 13, 2018
    Publication date: March 19, 2020
    Inventor: Anthony Paul VAN SELOW