Patents by Inventor Anthony Sinnot

Anthony Sinnot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for optically erasing charge buildup during fabrication of an integrated circuit
    Patent number: 6803319
    Abstract: A process for optically reducing charge build-up in an integrated circuit includes exposing the integrated circuit or portions thereof to a broadband radiation source. The process effectively reduces charge buildup that occurs in the manufacture of integrated circuits.
    Type: Grant
    Filed: February 18, 2003
    Date of Patent: October 12, 2004
    Assignee: Axcelis Technologies, Inc.
    Inventors: Alan C. Janos, Anthony Sinnot, Ivan Berry, Kevin Stewart, Robert Douglas Mohondro
  • PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF AN INTEGRATED CIRCUIT
    Publication number: 20030180976
    Abstract: A process for optically reducing charge build-up in an integrated circuit includes exposing the integrated circuit or portions thereof to a broadband radiation source. The process effectively reduces charge buildup that occurs in the manufacture of integrated circuits.
    Type: Application
    Filed: February 18, 2003
    Publication date: September 25, 2003
    Inventors: Alan C. Janos, Anthony Sinnot, Ivan Berry, Kevin Stewart, Robert Douglas Mohondro
  • Process for optically erasing charge buildup during fabrication of an integrated circuit
    Patent number: 6605484
    Abstract: A process for optically reducing charge build-up in an integrated circuit includes exposing the integrated circuit or portions thereof to a broadband radiation source. The process effectively reduces charge buildup that occurs in the manufacture of integrated circuits.
    Type: Grant
    Filed: November 30, 2001
    Date of Patent: August 12, 2003
    Assignee: Axcelis Technologies, Inc.
    Inventors: Alan C. Janos, Anthony Sinnot, Ivan Berry, Kevin Stewart, Robert Douglas Mohondro
  • PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF AN INTEGRATED CIRCUIT
    Publication number: 20030104644
    Abstract: A process for optically reducing charge build-up in an integrated circuit includes exposing the integrated circuit or portions thereof to a broadband radiation source. The process effectively reduces charge buildup that occurs in the manufacture of integrated circuits.
    Type: Application
    Filed: November 30, 2001
    Publication date: June 5, 2003
    Inventors: Alan C. Janos, Anthony Sinnot, Ivan Berry, Kevin Stewart