Patents by Inventor Anthony William Barrass

Anthony William Barrass has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetron sputtering apparatus
    Publication number: 20040050690
    Abstract: A magnetic assembly (15) is mounted on a lead screw (12) on one side of a spunter target (14). A further lead screw (11) carries a counter weight (16). The lead screws can be rotated by a stepper motor (13) to adjust the lateral positions of assembly (15) and weight (16). The stepper motor and hence the assembly (15), can be rotated about a vertical axis by shaft (17) and motor (18) so that a magnetic field can be swept around the target (14). The position of the assembly (15) is varied in accordance with a process characteristic.
    Type: Application
    Filed: September 16, 2003
    Publication date: March 18, 2004
    Inventors: Gordon Robert Green, Robert Kenneth Trowell, Anthony William Barrass, Robert William Teagle, Ian Moncrieff, Stephen Robert Burgess
  • Deposition apparatus
    Patent number: 6533868
    Abstract: This invention relates to an apparatus for depositing a layer of material on to a workpiece. The apparatus includes chamber 11, a sputter target 12, a wafer support 13, wafer transport aperture 14 and a wafer transport mechanism 15. The last delivers the wafers along a transport path 16. An annular shield 19 is disposed between the support 13 and the target 12 and lies in the wafer transport path 16. Pins 30 are provided to lift the annular shield out of the transport path 16.
    Type: Grant
    Filed: May 11, 2000
    Date of Patent: March 18, 2003
    Assignee: Trikon Holdings Limited
    Inventors: Gordon Robert Green, Robert William Teagle, Anthony William Barrass