Patents by Inventor Antoine A. Noujaim

Antoine A. Noujaim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240110836
    Abstract: The disclosure relates to a substrate support assembly and apparatus for measuring the temperature of a substrate disposed on the support assembly. In one embodiment, a substrate temperature measurement apparatus includes a substrate support assembly, a probe assembly, and a probe target. The substrate support assembly includes an electrostatic chuck and one or more plates. The probe assembly within the substrate support assembly extends through one or more of the one or more plates. The probe assembly includes an optical probe sensor, an optical fiber coupled to the optical probe sensor, and an insulating sheath surrounding the optical fiber. The probe target includes a phosphor coating, is in contact with the electrostatic chuck, and is spaced from the probe assembly.
    Type: Application
    Filed: September 14, 2023
    Publication date: April 4, 2024
    Inventors: Sankaranarayanan RAVI, Alvaro GARCIA, Martin Perez GUZMAN, Stephen Donald PROUTY, Andrew Antoine NOUJAIM
  • Patent number: 11764041
    Abstract: Embodiments described herein relate to a substrate support assembly which enables adjustment of the thermal conductivity therein. The substrate support assembly has heater and cooling channel. An adjustable thermal break disposed between the heater and the cooling channel. The adjustable thermal break has one or more fluid conduits coupled thereto and configured to flow a fluid into and out of the adjustable thermal break for variant the thermal conductivity between the heater and the cooling channel.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: September 19, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Alvaro Garcia De Gorordo, Daniel Sang Byun, Andreas Schmid, Stephen Donald Prouty, Andrew Antoine Noujaim
  • Patent number: 11646183
    Abstract: Semiconductor chamber components are described herein that includes one or more conduits for carrying a fluid between powered and grounded portions of the chamber component, the conduit configure to be less prone to arcing as compared to conventional components. In one example, a semiconductor chamber component is provided that includes a powered region, a grounded region, and a fluid conduit. The fluid conduit is disposed within the semiconductor chamber component and passes through the powered and grounded regions. The fluid conduit has an end to end electrical resistance of between 0.1 to 100 M?.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: May 9, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Stephen Donald Prouty, Alvaro Garcia De Gorordo, Andreas Schmid, Andrew Antoine Noujaim
  • Patent number: 11569114
    Abstract: Embodiments described herein relate to a substrate support assembly. The substrate support assembly includes an ESC base assembly having a base channel disposed therein, a facility plate, the facility plate coupled to the ESC base assembly with a vacuum region therebetween, and a seal assembly. The seal assembly includes an upper flange coupled to the base channel of the ESC base assembly, the upper flange disposed in the facility plate, a lower flange coupled to the upper flange, the lower flange disposed in the facility plate, a gasket disposed between the upper flange and the lower flange, and an insulator tube coupled to the lower flange. A passage is connected to the base channel, the passage is defined by connected openings of the upper flange, the gasket, the lower flange, the insulator tube, and the base assembly.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: January 31, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid, Stephen Donald Prouty, Andrew Antoine Noujaim
  • Patent number: 11437261
    Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a refrigerant channel disposed therein, and a facility plate having a coolant channel disposed therein. The facility plate includes a plate portion and a flange portion. The plate portion is coupled to the ESC base assembly and the flange portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the flange portion of the facility plate, and the seal assembly.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: September 6, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Donald Prouty, Álvaro García De Gorordo, Andreas Schmid, Andrew Antoine Noujaim
  • Publication number: 20220262664
    Abstract: Embodiments described herein relate to a substrate support assembly. The substrate support assembly includes an ESC base assembly having a base channel disposed therein, a facility plate, the facility plate coupled to the ESC base assembly with a vacuum region therebetween, and a seal assembly. The seal assembly includes an upper flange coupled to the base channel of the ESC base assembly, the upper flange disposed in the facility plate, a lower flange coupled to the upper flange, the lower flange disposed in the facility plate, a gasket disposed between the upper flange and the lower flange, and an insulator tube coupled to the lower flange. A passage is connected to the base channel, the passage is defined by connected openings of the upper flange, the gasket, the lower flange, the insulator tube, and the base assembly.
    Type: Application
    Filed: February 12, 2021
    Publication date: August 18, 2022
    Inventors: Yogananda SARODE VISHWANATH, Steven E. BABAYAN, Andreas SCHMID, Stephen Donald PROUTY, Andrew Antoine NOUJAIM
  • Patent number: 11373893
    Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a base channel disposed therein, and a facility plate having a facility channel disposed therein. The facility plate includes a plate portion and a wall portion. The plate portion is coupled to the ESC base assembly and the wall portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the wall portion of the facility plate, and the seal assembly.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: June 28, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Donald Prouty, Alvaro Garcia De Gorordo, Andreas Schmid, Andrew Antoine Noujaim
  • Publication number: 20210375599
    Abstract: An electrical connector for a substrate support assembly is disclosed herein. The electrical connector includes a first interface body, and a second interface body coupled to the first interface body and to a third interface body. The second interface body is circumscribed by the third interface body. The first interface body and the second interface body each comprise a plurality of electrical terminals disposed in sockets formed in the respective first and second interface bodies, each electrical terminal disposed in sockets of the first interface body coupled to a respective one of the electrical terminals disposed in sockets of the second interface body to form a plurality of isolated conductive electrical unions, wherein the second interface body includes a plurality of protruding sidewalls that extend into the first interface body between each of the electrical terminals of the first interface body.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Andrew Antoine NOUJAIM, Álvaro GARCÍA DE GORORDO, Andreas SCHMID, Stephen Donald PROUTY
  • Publication number: 20210343512
    Abstract: A substrate support assembly is described herein that includes a facility plate, a ground plate coupled to the facility plate, a fluid conduit disposed within the substrate support assembly disposed through the facility plate and the ground plate, and a connector coupled to the ground plate that houses a portion of the fluid conduit. The connector includes a biasing assembly and a fastener disposed in a pocket formed in the ground plate.
    Type: Application
    Filed: April 30, 2020
    Publication date: November 4, 2021
    Inventors: Vijay D. PARKHE, Andreas SCHMID, Andrew Antoine NOUJAIM, Stephen Donald PROUTY, Alvaro GARCIA DE GORORDO, Martin PEREZ-GUZMAN
  • Publication number: 20210296101
    Abstract: Semiconductor chamber components are described herein that includes one or more conduits for carrying a fluid between powered and grounded portions of the chamber component, the conduit configure to be less prone to arcing as compared to conventional components. In one example, a semiconductor chamber component is provided that includes a powered region, a grounded region, and a fluid conduit. The fluid conduit is disposed within the semiconductor chamber component and passes through the powered and grounded regions. The fluid conduit has an end to end electrical resistance of between 0.1 to 100 M?.
    Type: Application
    Filed: March 20, 2020
    Publication date: September 23, 2021
    Inventors: Stephen Donald PROUTY, Alvaro GARCIA DE GORORDO, Andreas SCHMID, Andrew Antoine NOUJAIM
  • Publication number: 20210082730
    Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a base channel disposed therein, and a facility plate having a facility channel disposed therein. The facility plate includes a plate portion and a wall portion. The plate portion is coupled to the ESC base assembly and the wall portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the wall portion of the facility plate, and the seal assembly.
    Type: Application
    Filed: August 19, 2020
    Publication date: March 18, 2021
    Inventors: Yogananda SARODE VISHWANATH, Steven E. BABAYAN, Stephen Donald PROUTY, Alvaro Garcia DE GORORDO, Andreas SCHMID, Andrew Antoine NOUJAIM
  • Publication number: 20200395197
    Abstract: Embodiments described herein relate to a substrate support assembly which enables adjustment of the thermal conductivity therein. The substrate support assembly has heater and cooling channel. An adjustable thermal break disposed between the heater and the cooling channel. The adjustable thermal break has one or more fluid conduits coupled thereto and configured to flow a fluid into and out of the adjustable thermal break for variant the thermal conductivity between the heater and the cooling channel.
    Type: Application
    Filed: June 15, 2020
    Publication date: December 17, 2020
    Inventors: Alvaro GARCIA DE GORORDO, Daniel Sang BYUN, Andreas SCHMID, Stephen Donald PROUTY, Andrew Antoine NOUJAIM
  • Publication number: 20200185248
    Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a refrigerant channel disposed therein, and a facility plate having a coolant channel disposed therein. The facility plate includes a plate portion and a flange portion. The plate portion is coupled to the ESC base assembly and the flange portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the flange portion of the facility plate, and the seal assembly.
    Type: Application
    Filed: December 11, 2018
    Publication date: June 11, 2020
    Inventors: Yogananda SARODE VISHWANATH, Steven E. BABAYAN, Stephen Donald PROUTY, Álvaro GARCÍA DE GORORDO, Andreas SCHMID, Andrew Antoine NOUJAIM
  • Publication number: 20140187752
    Abstract: Methods and compositions are provided for delivery of therapeutic nucleic acids to a target cell. A chimeric antigen is provided to encapsulate, bind, or otherwise carry a nucleic acid molecule to a target cell where the chimeric antigen and nucleic acid are internalized, for example by receptor-mediated endocytosis. The chimeric antigen has a nucleic acid interaction domain, a target binding domain, and an immune response domain that may include a target antigen. Targeting is generally provided by the specificity of the target binding domain for a particular target cell receptor, but may also be provided by inclusion of a targeting antigen within the immune response domain. The combined delivery of chimeric antigen and nucleic acid, which may be a siRNA, may be synergistic in certain applications, for example in breaking host tolerance to a virus or in providing immunostimulation.
    Type: Application
    Filed: December 19, 2013
    Publication date: July 3, 2014
    Applicant: Akshaya Bio Inc.
    Inventors: Rajan George, Antoine Noujaim
  • Publication number: 20130302330
    Abstract: Disclosed herein are compositions and methods for eliciting immune responses against antigens. In particular embodiments, the compounds and methods elicit immune responses against antigens that are otherwise recognized by the host as “self” antigens. The immune response is enhanced by presenting the host immune system with a chimeric antigen comprising an immune response domain and a target binding domain, wherein the target binding domain comprises a xenotypic antibody fragment. By virtue of the target binding domain, antigen presenting cells take up, process, and present the chimeric antigen, eliciting both a humoral and cellular immune response.
    Type: Application
    Filed: May 20, 2013
    Publication date: November 14, 2013
    Inventors: Rajan George, Lorne Tyrrell, Antoine Noujaim, Dakun Wang, Allan Ma
  • Publication number: 20130295610
    Abstract: Disclosed herein are compositions and methods for eliciting immune responses against antigens. In particular embodiments, the compounds and methods elicit immune responses against antigens that are otherwise recognized by the host as “self” antigens. The immune response is enhanced by presenting the host immune system with a chimeric antigen comprising an immune response domain and a target binding domain, wherein the target binding domain comprises a xenotypic antibody fragment. By virtue of the target binding domain, antigen presenting cells take up, process, and present the chimeric antigen, eliciting both a humoral and cellular immune response.
    Type: Application
    Filed: May 22, 2013
    Publication date: November 7, 2013
    Inventors: Rajan George, Lorne Tyrrell, Antoine Noujaim, Dakun Wang, Allan Ma
  • Patent number: 8465745
    Abstract: Disclosed herein are compositions and methods for eliciting immune responses against antigens. In particular embodiments, the compounds and methods elicit immune responses against antigens that are otherwise recognized by the host as “self” antigens. The immune response is enhanced by presenting the host immune system with a chimeric antigen comprising an immune response domain and a target binding domain, wherein the target binding domain comprises a xenotypic antibody fragment. By virtue of the target binding domain, antigen presenting cells take up, process, and present the chimeric antigen, eliciting both a humoral and cellular immune response.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: June 18, 2013
    Assignee: Akshaya Bio Inc.
    Inventors: Rajan George, Lorne Tyrrell, Antoine Noujaim, Dakun Wang, Allan Ma
  • Publication number: 20120070435
    Abstract: Disclosed herein are compositions and methods for eliciting immune responses against antigens. In particular embodiments, the compounds and methods elicit immune responses against antigens that are otherwise recognized by the host as “self” antigens. The immune response is enhanced by presenting the host immune system with a chimeric antigen comprising an immune response domain and a target binding domain, wherein the target binding domain comprises a xenotypic antibody fragment. By virtue of the target binding domain, antigen presenting cells take up, process, and present the chimeric antigen, eliciting both a humoral and cellular immune response.
    Type: Application
    Filed: August 15, 2011
    Publication date: March 22, 2012
    Applicant: PALADIN LABS, INC.
    Inventors: Rajan George, Lorne Tyrrell, Antoine Noujaim, Dakun Wang, Allan Ma
  • Patent number: 8038994
    Abstract: Disclosed are methods for treating cancer comprising administering a xenotypic antibody and a chemotherapeutic drug to a patient suffering from cancer. Also disclosed is a method for inducing a host immune response in a patient against a multi-epitopic in vivo tumor antigen present in the host serum, which antigen does not elicit an effective host immune response, comprising administering to the patient a chemotherapeutic drug and a composition comprising a binding agent that specifically binds to a first epitope on the antigen and allowing the binding agent to form a binding agent/antigen pair, wherein an effective host immune response is elicited against a second epitope on the antigen.
    Type: Grant
    Filed: April 26, 2004
    Date of Patent: October 18, 2011
    Assignee: Quest Pharmatech Inc.
    Inventors: Birgit C. Schultes, Christopher F. Nicodemus, Antoine A. Noujaim, Ragupathy Madiyalakan
  • Patent number: 8029803
    Abstract: Disclosed herein are the nucleotide sequences, deduced amino acid sequences as well as methods and compositions necessary to elicit immune responses against chronic Hepatitis B infections in animals and humans. Immune response is enhanced by fusing relevant viral antigens with xenotypic immunoglobulin heavy chain region through a peptide linker and producing the fusion proteins in Baculovirus expression system to incorporate high mannose glycosylation. By virtue of the antibody component, the fusion proteins bind to Fc receptors on the surface of antigen presenting cells, are taken up, processed and derived peptides are presented on MHC Class I, which elicit a CTL (Th1) response. In a similar fashion, due to cross priming and presentation on MHC Class II, will elicit a humoral (Th2) response. In addition, disclosed are the methods of cloning, expression and production of the fusion proteins.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: October 4, 2011
    Assignee: Paladin Labs, Inc.
    Inventors: Rajan George, Lorne Tyrrell, Antoine Noujaim