Abstract: The efficiency of a metal silicide infrared (10) in greatly enhanced by depositing on the substrate (14) a stack (30) of alternating metal silicide (12,24) and silicon layers (22). The metal silicide layers (12,24) are connected to each other and to a contact pad (20) in the substrate (14) by a metal silicide deposit (32) on one side of the stack (30) and the silicon layers (22) are connected to each other and to the substrate (14) by a silicon deposit (34) on another side of the stack (30). The stacking of layers is made possible by depositing the silicon layers (22) at a rate of 1 .ANG./sec or less in a vacuum of 10.sup.-9 torr or better at a temperature of about 250.degree. C.

Abstract: The efficiency of a metal silicide infrared detector (10) in greatly enhanced by depositing on the substrate (14) a stack (30) of alternating metal silicide (12,24) and silicon layers (22). The metal silicide layers (12,24) are connected to each other and to a contact pad (20) in the substrate (14) by a metal silicide deposit (32) on one side of the stack (30) and the silicon layers (22) are connected to each other and to the substrate (14) by a silicon deposit (34) on another side of the stack (30). The stacking of layers is made possible by depositing the silicon layers (22) at a rate of 1 .ANG./sec or less in a vacuum of 10.sup.-9 torr or better at a temperature of about 250.degree. C.

Abstract: A substrate includes an alignment key for forming features in or on both surfaces of the substrate which are in alignment with each other. The alignment key includes a plurality of adjacent but spaced apart small openings formed in one surface of the substrate through a P-type region at said one surface and a large opening extending through the substrate from its other surface to the P-type region. The larger opening exposes the smaller openings so that they can be seen from both sides of the substrate. The smaller openings are arranged to form an alignment mark.

Abstract: An improved lapping apparatus is disclosed of the type having a disc shaped lapping surface that rotates while a part to be lapped is held in engagement therewith. The improvement includes control apparatus for controlling the speed of rotation of the lap with respect to the radial position of the part on the lapping surface so that the surface speed of the lap relative to the part is held at a constant level as the part traverses the lapping surface.