Patents by Inventor Anton Labanc

Anton Labanc has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12206372
    Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: January 21, 2025
    Assignee: COMET AG
    Inventors: Daniel Gruner, André Grede, Nikolai Schwerg, Anton Labanc, Manuel vor dem Brocke, Roland Schlierf
  • Patent number: 12132454
    Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: October 29, 2024
    Assignee: COMET AG
    Inventors: Daniel Gruner, Andreas Hartmann, Philippe Dennler, Markus Reiff, André Grede, Anton Labanc
  • Publication number: 20240355598
    Abstract: A method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, including providing at least one input signal each related to an analog signal of a power delivery system for the plasma system and/or to another characteristic of the power delivery system and/or of the plasma system. The at least one input signal having at least one irregularity feature indicative of the irregularity in the plasma system, performing a machine learning procedure wherein the at least one input signal having the at least one irregularity feature is processed by a programmable circuit to train the detection of the irregularity in the plasma system.
    Type: Application
    Filed: July 4, 2022
    Publication date: October 24, 2024
    Inventors: Thomas Fink, André Grede, Daniel Gruner, Anton Labanc, Roland Schlierf, Nikolai Schwerg, Manuel vor dem Brocke
  • Patent number: 12126347
    Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (?i), and amplitude (Ai), including a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (?ref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (?PLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal; wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: October 22, 2024
    Assignee: COMET AG
    Inventors: Manuel vor dem Brocke, Roland Schlierf, André Grede, Daniel Gruner, Anton Labanc
  • Publication number: 20240321553
    Abstract: A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.
    Type: Application
    Filed: December 30, 2020
    Publication date: September 26, 2024
    Inventors: André Grede, Daniel Gruner, Anton Labanc, Roland Schlierf, Nikolai Schwerg, Manuel vor dem Brocke
  • Publication number: 20240296270
    Abstract: A method for improving digital signal processing in a radio-frequency system, in particular a radio-frequency power delivery system, including providing at least one input signal, preferably related to a radio-frequency signal of the radio-frequency system, performing a processing procedure wherein the at least one input signal is repeatedly processed by a programmable circuit using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal to obtain respective processing results, determining at least one parameter result for an optimization of the configuration based on the processing results, and providing the at least one determined parameter result for the improved digital signal processing.
    Type: Application
    Filed: June 24, 2022
    Publication date: September 5, 2024
    Inventors: Nikolai Schwerg, Roland Schlierf, André Grede, Daniel Gruner, Anton Labanc, Thomas Fink, Manuel vor dem Brocke
  • Patent number: 11770892
    Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: September 26, 2023
    Assignee: COMET AG
    Inventors: Anton Labanc, Daniel Gruner
  • Publication number: 20230298871
    Abstract: Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
    Type: Application
    Filed: May 26, 2023
    Publication date: September 21, 2023
    Inventors: Anton Labanc, Daniel Gruner, André Grede
  • Publication number: 20230283282
    Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (?i), and amplitude (Ai), including a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (?ref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (?PLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal; wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (
    Type: Application
    Filed: August 3, 2021
    Publication date: September 7, 2023
    Inventors: Manuel vor dem Brocke, Roland Schlierf, André Grede, Daniel Gruner, Anton Labanc
  • Patent number: 11705314
    Abstract: Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: July 18, 2023
    Assignee: COMET AG
    Inventors: Anton Labanc, Daniel Gruner, André Grede
  • Publication number: 20220216838
    Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
    Type: Application
    Filed: May 22, 2020
    Publication date: July 7, 2022
    Inventors: Daniel Gruner, André Grede, Nikolai Schwerg, Anton Labanc, Manuel vor dem Brocke, Roland Schlierf
  • Patent number: 11382206
    Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: July 5, 2022
    Assignee: COMET AG
    Inventors: André Grede, Daniel Gruner, Anton Labanc
  • Publication number: 20220060160
    Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.
    Type: Application
    Filed: December 12, 2019
    Publication date: February 24, 2022
    Inventors: Daniel Gruner, Andreas Hartmann, Philippe Dennler, Markus Reiff, André Grede, Anton Labanc
  • Patent number: 11146224
    Abstract: A generator including a power combiner is provided. The power combiner includes a plurality of inputs, each input connectable to a respective power amplifier for receiving a respective power signal. A plurality of impedance matching circuit branches is connected to a respective one of the plurality of inputs. Each impedance matching circuit branch includes at least one high pass filter section and at least one low pass filter section through which the respective power signal passes. The impedance matching circuit branches are connected so as to combine the power signals from each power amplifier. An output is provided for outputting the combined power signal.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: October 12, 2021
    Assignee: Comet AG
    Inventors: Daniel Gruner, Anton Labanc, Cyril Guinnard
  • Publication number: 20210259092
    Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.
    Type: Application
    Filed: August 20, 2018
    Publication date: August 19, 2021
    Inventors: André Grede, Daniel Gruner, Anton Labanc
  • Publication number: 20210259090
    Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.
    Type: Application
    Filed: February 16, 2021
    Publication date: August 19, 2021
    Inventors: Anton Labanc, Daniel Gruner
  • Patent number: 11038479
    Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.
    Type: Grant
    Filed: February 19, 2018
    Date of Patent: June 15, 2021
    Assignee: Comet AG
    Inventors: Anton Labanc, Daniel Gruner
  • Publication number: 20210074529
    Abstract: In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
    Type: Application
    Filed: September 9, 2020
    Publication date: March 11, 2021
    Inventors: Anton Labanc, Daniel Gruner, André Grede
  • Publication number: 20210075380
    Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.
    Type: Application
    Filed: February 19, 2018
    Publication date: March 11, 2021
    Inventors: Anton Labanc, Daniel Gruner
  • Publication number: 20200251309
    Abstract: The invention relates to high-frequency amplifier apparatuses suitable for generating power outputs of at least 1 kW at frequencies of at least 2 MHz. The apparatuses include two LDMOS transistors each connected by their source connection to ground. The transistors can have the same design and can be arranged in an assembly (package). The apparatus also includes a circuit board lying against a cooling plate, which can be connected to ground, and the assembly is arranged on or against the circuit board. The apparatuses have a power transformer, whose primary winding is connected to the drain connections of the transistors, and a signal transmitter. A secondary winding of the signal transmitter can be connected to the gate connections of the two transistors. Each of the gate connections can be connected to ground via at least one voltage-limiting structural element.
    Type: Application
    Filed: April 21, 2020
    Publication date: August 6, 2020
    Inventors: Andre Grede, Alexander Alt, Daniel Gruner, Anton Labanc