Abstract: In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

Abstract: A wafer processing system employing a single-wafer load lock with integrated cooling unit is disclosed. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By integrating a cooling unit within the load lock, system throughput is further increased by eliminating the need to move a newly processed wafer to a separate cooling unit before moving the wafer to the load lock.

Abstract: A mechanism for locking and unlocking a reciprocating shaft includes a plate fixed to the shaft having an inclined surface. A housing surrounds the shaft and plate having a wall surrounding the inclined surface. A set of balls is located between the inclined surface and the housing wall. An assembly is translatable relative to the shaft and is biased by a spring to jam the balls between the inclined surface and the housing wall to lock the shaft against reciprocation. The assembly is movable against the force of the spring by a fluid pressure actuated cylinder to move the balls away from the inclined surface to unlock the shaft.

Abstract: An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate first moves linearly with the shaft until the guide frame stops against the housing. The seal plate then moves linearly in a direction perpendicular to a surface of the housing containing the port until it seals the port. Motion of the drive shaft in the opposite direction causes the seal plate to retrace its path. In one embodiment, the valve includes a second seal plate for sealing a second port. A spring between the guide means and the shaft provides pre-load which maintains the seal plates in a retracted position until the frame stops against the housing. An extension spring between the first and second seal plates eliminates play in the link mechanism and extends valve life.