Patents by Inventor Antonino Motta

Antonino Motta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for decontamination of a chamber used in vacuum processes for deposition, etching and/or growth of high purity films
    Patent number: 4892615
    Abstract: A decontamination system for processes for deposition, etching and/or growth of high purity films, particularly applicable to semiconductor technology.After introducing the products concerned with a process into a chamber and after creating a vacuum in the chamber, the chamber is decontaminated by a series of intermittent inflows of non-contaminating gas and subsequent pressure varying operations.
    Type: Grant
    Filed: December 2, 1987
    Date of Patent: January 9, 1990
    Assignee: SGS Microelettronica S.p.A.
    Inventor: Antonino Motta