Patents by Inventor Antonino Rigano

Antonino Rigano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240113224
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: December 6, 2023
    Publication date: April 4, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Publication number: 20240107747
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above and directly against a first capacitor electrode material. A mask is used to subtractively etch both the transistor material and thereafter the first capacitor electrode material to form a plurality of pillars that individually comprise the transistor material and the first capacitor electrode material. Capacitors are formed that individually comprise the first capacitor electrode material of individual of the pillars. Vertical transistors are formed above the capacitors that individually comprise the transistor material of the individual pillars. Other aspects and embodiments are disclosed, including structure independent of method.
    Type: Application
    Filed: December 8, 2023
    Publication date: March 28, 2024
    Applicant: Micron Technology, Inc.
    Inventor: Antonino Rigano
  • Patent number: 11888068
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: January 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Patent number: 11877438
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above and directly against a first capacitor electrode material. A mask is used to subtractively etch both the transistor material and thereafter the first capacitor electrode material to form a plurality of pillars that individually comprise the transistor material and the first capacitor electrode material. Capacitors are formed that individually comprise the first capacitor electrode material of individual of the pillars. Vertical transistors are formed above the capacitors that individually comprise the transistor material of the individual pillars. Other aspects and embodiments are disclosed, including structure independent of method.
    Type: Grant
    Filed: December 7, 2022
    Date of Patent: January 16, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Antonino Rigano
  • Patent number: 11694932
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Grant
    Filed: May 16, 2022
    Date of Patent: July 4, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Publication number: 20230206959
    Abstract: Some embodiments include an integrated assembly having digit lines supported by a base and extending along a first direction. A shield-connection-line is supported by the base and extends along the first direction. Transistor active regions are over the digit lines. Each of the active regions includes a channel region between an upper source/drain region and a lower source/drain region. The lower source/drain regions are coupled with the digit lines. Capacitors are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines extend along the second direction. The shield lines are above the digit lines and are coupled with the shield-connection-line.
    Type: Application
    Filed: February 27, 2023
    Publication date: June 29, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Antonino Rigano
  • Publication number: 20230200048
    Abstract: Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, an integrated assembly includes a pillar having an upper source/drain, a middle source/drain, a lower source/drain, an upper channel between the upper source/drain and the middle source/drain, and a lower channel between the middle source/drain and the lower source/drain. The integrated assembly includes a gate pair that includes a first gate and a second gate. The first gate is positioned on a first side of the pillar at a first height, and the second gate is positioned on a second side of the pillar, that is opposite the first side, at a second height that is different from the first height. The integrated assembly includes a capacitor that is electrically coupled with the upper source/drain. Some implementations include methods of forming the various structures, integrated assemblies, and memory devices.
    Type: Application
    Filed: December 21, 2021
    Publication date: June 22, 2023
    Inventors: Giorgio Servalli, Marcello Mariani, Antonino Rigano, Marcello Calabrese
  • Patent number: 11636882
    Abstract: Some embodiments include an integrated assembly having digit lines supported by a base and extending along a first direction. A shield-connection-line is supported by the base and extends along the first direction. Transistor active regions are over the digit lines. Each of the active regions includes a channel region between an upper source/drain region and a lower source/drain region. The lower source/drain regions are coupled with the digit lines. Capacitors are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines extend along the second direction. The shield lines are above the digit lines and are coupled with the shield-connection-line.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: April 25, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Mariani, Antonino Rigano
  • Publication number: 20230104755
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above and directly against a first capacitor electrode material. A mask is used to subtractively etch both the transistor material and thereafter the first capacitor electrode material to form a plurality of pillars that individually comprise the transistor material and the first capacitor electrode material. Capacitors are formed that individually comprise the first capacitor electrode material of individual of the pillars. Vertical transistors are formed above the capacitors that individually comprise the transistor material of the individual pillars. Other aspects and embodiments are disclosed, including structure independent of method.
    Type: Application
    Filed: December 7, 2022
    Publication date: April 6, 2023
    Applicant: Micron Technology, Inc.
    Inventor: Antonino Rigano
  • Patent number: 11557593
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above and directly against a first capacitor electrode material. A mask is used to subtractively etch both the transistor material and thereafter the first capacitor electrode material to form a plurality of pillars that individually comprise the transistor material and the first capacitor electrode material. Capacitors are formed that individually comprise the first capacitor electrode material of individual of the pillars. Vertical transistors are formed above the capacitors that individually comprise the transistor material of the individual pillars. Other aspects and embodiments are disclosed, including structure independent of method.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: January 17, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Antonino Rigano
  • Patent number: 11476304
    Abstract: A phase change memory device with reduced programming disturbance and its operation are described. The phase change memory includes an array with word lines and bit lines and voltage controlling elements coupled to bit lines adjacent to an addressed bit line to maintain the voltage of the adjacent bit lines within an allowed range.
    Type: Grant
    Filed: December 12, 2016
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Fabio Pellizzer, Antonino Rigano
  • Publication number: 20220278001
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Application
    Filed: May 16, 2022
    Publication date: September 1, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Patent number: 11373914
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Grant
    Filed: September 16, 2020
    Date of Patent: June 28, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Publication number: 20220173109
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above and directly against a first capacitor electrode material. A mask is used to subtractively etch both the transistor material and thereafter the first capacitor electrode material to form a plurality of pillars that individually comprise the transistor material and the first capacitor electrode material. Capacitors are formed that individually comprise the first capacitor electrode material of individual of the pillars. Vertical transistors are formed above the capacitors that individually comprise the transistor material of the individual pillars. Other aspects and embodiments are disclosed, including structure independent of method.
    Type: Application
    Filed: November 30, 2020
    Publication date: June 2, 2022
    Applicant: Micron Technology, Inc.
    Inventor: Antonino Rigano
  • Publication number: 20220068722
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (h): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Application
    Filed: September 16, 2020
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Publication number: 20220037533
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: October 15, 2021
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Patent number: 11177389
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Patent number: 11049769
    Abstract: Methods and structures provide horizontal conductive lines of fine pitch and self-aligned contacts extending from them, where the contacts have at least one dimension with a more relaxed pitch. Buried hard mask materials permit self-alignment of the lines and contacts without a critical mask, such as for word-line electrode lines and word-line contacts in a memory device.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: June 29, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Fabio Pellizzer, Antonino Rigano, Roberto Somaschini
  • Publication number: 20210125642
    Abstract: Some embodiments include an integrated assembly having digit lines supported by a base and extending along a first direction. A shield-connection-line is supported by the base and extends along the first direction. Transistor active regions are over the digit lines. Each of the active regions includes a channel region between an upper source/drain region and a lower source/drain region. The lower source/drain regions are coupled with the digit lines. Capacitors are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines extend along the second direction. The shield lines are above the digit lines and are coupled with the shield-connection-line.
    Type: Application
    Filed: October 29, 2019
    Publication date: April 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Antonino Rigano
  • Publication number: 20210036162
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 30, 2019
    Publication date: February 4, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani