Patents by Inventor Antonio F. Saavedra, Jr.

Antonio F. Saavedra, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature fusion bonding with high surface energy using a wet chemical treatment
    Patent number: 7713837
    Abstract: Described is a wet chemical surface treatment involving NH4OH that enables extremely strong direct bonding of two wafer such as semiconductors (e.g., Si) to insulators (e.g., SiO2) at low temperatures (less than or equal to 400° C.). Surface energies as high as ˜4835±675 mJ/m2 of the bonded interface have been achieved using some of these surface treatments. This value is comparable to the values reported for significantly higher processing temperatures (less than 1000° C.). Void free bonding interfaces with excellent yield and surface energies of ˜2500 mJ/m2 have also be achieved herein.
    Type: Grant
    Filed: May 28, 2008
    Date of Patent: May 11, 2010
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Kathryn Wilder Guarini, Erin C. Jones, Antonio F. Saavedra, Jr., Leathen Shi, Dinkar V. Singh
  • Low temperature fusion bonding with high surface energy using a wet chemical treatment
    Patent number: 7566631
    Abstract: Described is a wet chemical surface treatment involving NH4OH that enables extremely strong direct bonding of two wafer such as semiconductors (e.g., Si) to insulators (e.g., SiO2) at low temperatures (less than or equal to 400° C.). Surface energies as high as ˜4835±675 mJ/m2 of the bonded interface have been achieved using some of these surface treatments. This value is comparable to the values reported for significantly higher processing temperatures (less than 1000° C.). Void free bonding interfaces with excellent yield and surface energies of ˜2500 mJ/m2 have also be achieved herein.
    Type: Grant
    Filed: April 26, 2006
    Date of Patent: July 28, 2009
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Kathryn Wilder Guarini, Erin C. Jones, Antonio F. Saavedra, Jr., Leathen Shi, Dinkar V. Singh