Abstract: A flexible sensor is provided which has a flexible substrate of polymeric material, a bottom electrode layer arranged on the flexible substrate and configured to be a reference electrode, an active layer of piezoelectric material arranged on the bottom electrode layer, a top electrode layer arranged on the active layer and configured to be connected to a signal conductor, and a flexible coating layer of polymeric material that cooperates with the flexible substrate to encapsulate the bottom electrode layer, the active layer, and the top electrode layer. The flexible sensor has an additional layer of metal material arranged on the flexible coating layer and short-circuited to the bottom electrode layer, the additional layer and the bottom electrode layer acting as an electromagnetic shield for the flexible sensor.

Abstract: An electroactive microelectromechanical device of the Artificial Hair Cell type includes a moving cilium structure having a substrate and a cantilever, partly or entirely in piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage. The cantilever includes a multilayer inducing a stress-driven geometry in which a portion of the cantilever lies outside of a plane defined by the substrate. According to the invention, the cantilever is associated to a piezoresistive element, in particular of piezoresistive material configured to measure the bending or deformation of the cantilever.