Patents by Inventor Antonius Aarnink

Antonius Aarnink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a device structure using selective deposition of gallium nitride and system for same
    Patent number: 11658029
    Abstract: A method of forming a device structure including a selectively-deposited gallium nitride layer is disclosed.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: May 23, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Sourish Banerjee, Antonius Aarnink, Alexey Kovalgin
  • REACTOR AND RELATED METHODS
    Publication number: 20220145455
    Abstract: Systems and related methods are described that can be used for etching and/or depositing materials. In some embodiments, the systems comprise an outer chamber and an inner chamber. The inner chamber can comprise a lower chamber part and an upper chamber part which are moveable with respect to each other between a closed position and an open position. The upper chamber part and the lower chamber part can abut in the closed position. The upper chamber part and the lower chamber part may further define an opening in the open position.
    Type: Application
    Filed: November 9, 2021
    Publication date: May 12, 2022
    Inventors: Antonius Aarnink, Alexey Kovalgin, Peter Jan Cornelis Scheeren
  • METHOD OF FORMING A DEVICE STRUCTURE USING SELECTIVE DEPOSITION OF GALLIUM NITRIDE AND SYSTEM FOR SAME
    Publication number: 20200194253
    Abstract: A method of forming a device structure including a selectively-deposited gallium nitride layer is disclosed.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 18, 2020
    Inventors: Sourish Banerjee, Antonius Aarnink, Alexey Kovalgin