Patents by Inventor Antonius Johannes Josephus Van Dijsseldonk Van Dijsseldonk

Antonius Johannes Josephus Van Dijsseldonk Van Dijsseldonk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, spectral purity filter and device manufacturing method
    Patent number: 9594306
    Abstract: A lithographic apparatus for patterning a beam of radiation and projecting it onto a substrate, comprising at least two spectral purity filters configured to reduce the intensity of radiation in the beam of radiation in at least one undesirable range of radiation wavelength, wherein the two spectral purity filters are provided with different radiation filtering structures from each other.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: March 14, 2017
    Assignee: ASML Netherlands B.V.
    Inventors: Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin